Shift register and display device

ABSTRACT

The shift register includes first to fourth flip-flops. A first clock signal which is in a first voltage state in a first period and in a second voltage state in second to fourth periods is input to the first flip-flop. A second clock signal which is in the first voltage state in the second period and in the second voltage state in the third period and the fourth period is input to the second flip-flop. A third clock signal which is in the second voltage state in the first, second, and fourth periods and in the first voltage state in the third period is input to the third flip-flop. A fourth clock signal which is in the second voltage state in the first and second periods and in the first voltage state in the fourth period is input to the fourth flip-flop.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a continuation of U.S. application Ser. No.12/897,375, filed Oct. 4, 2010, now allowed, which claims the benefit offoreign priority application filed in Japan as Serial No. 2009-235109 onOct. 9, 2009 and Serial No. 2009-273914 on Dec. 1, 2009, all of whichare incorporated by reference.

DESCRIPTION Technical Field

The present invention relates to a shift register and a display deviceprovided with a driver circuit including the shift register.

BACKGROUND ART

A thin film transistor (TFT) formed over a flat plate such as a glasssubstrate, which is typically used in a liquid crystal display device,is generally formed using a semiconductor material such as amorphoussilicon or polycrystalline silicon. Although TFTs formed using amorphoussilicon have low field-effect mobility, they have an advantage thatlarger glass substrates can be used. On the other hand, TFTs formedusing polycrystalline silicon have high field-effect mobility but need acrystallization step such as laser annealing and are not alwaysadaptable to increase in size of glass substrates.

In view of the foregoing, TFT formed using an oxide semiconductor as asemiconductor material has attracted attention. For example, PatentDocuments 1 and 2 each disclose a technique in which a TFT is formedusing zinc oxide or an In—Ga—Zn—O-based oxide semiconductor as asemiconductor material and used for a switching element in an imagedisplay device.

A TFT in which a channel formation region is provided in an oxidesemiconductor can have a higher electric-field mobility than a TFTformed using amorphous silicon. Further, an oxide semiconductor film canbe formed at a temperature of 300° C. or lower by a sputtering method orthe like, and a manufacturing process of the TFT formed using an oxidesemiconductor is simpler than that of the TFT formed usingpolycrystalline silicon.

TFTs which are formed using such an oxide semiconductor are expected tobe applied to switching elements included in a pixel portion and adriver circuit of a display device such as a liquid crystal display, anelectroluminescent display (also referred to as an EL display), andelectronic paper. For example, Non-Patent Document 1 discloses atechnique by which a pixel portion and a driver circuit of a displaydevice include TFTs formed using the above oxide semiconductor.

Note that the TFTs formed using the above oxide semiconductor are alln-channel transistors. Therefore, in the case where a driver circuitincludes a thin film transistor formed using an oxide semiconductor, thedriver circuit includes only n-channel transistors (hereinafter alsoreferred to as a unipolar transistor).

REFERENCE

-   [Patent Document 1] Japanese Published Patent Application No.    2007-123861-   [Patent Document 2] Japanese Published Patent Application No.    2007-096055-   [Non-Patent Document 1] T. Osada, et al., SID 09 DIGEST, pp. 184-187    (2009)

DISCLOSURE OF INVENTION

A driver circuit includes a shift register, a buffer, and the like. Forexample, in the case where the shift register includes only unipolartransistors, there is a problem in that voltage of an output signal ofeach of flip-flops decreases or increases by the same amount as thethreshold voltage of the transistor. Therefore, bootstrap operation isoften performed in a portion where such a problem occurs. Further, inthe case where a load of a driver circuit in which bootstrap operationis performed becomes heavy, parasitic capacitance generated in thedriver circuit becomes large. As a result, there is a problem in thatpower consumption of a shift register used in the driver circuitincreases due to the parasitic capacitance.

An object of one embodiment of the present invention is to reduce powerconsumption of a shift register.

According to one embodiment of the present invention, flip-flops in ashift register are supplied with clock signals of as many kinds aspossible, whereby each of the flip-flops can operate more selectivelyduring each operation period, leading to a reduction in powerconsumption.

One embodiment of the present invention is a shift register including afirst flip-flop to which a first clock signal which is in a firstvoltage state in a first period and in a second voltage state in secondto fourth periods is input; a second flip-flop to which a second clocksignal which is in the first voltage state in at least part of thesecond period and in the second voltage state in at least part of thethird period, and the fourth period is input; a third flip-flop to whicha third clock signal which is in the second voltage state in the first,second, and fourth periods and in the first voltage state in the thirdperiod is input; and a fourth flip-flop to which a fourth clock signalwhich is in the second voltage state in at least part of the firstperiod, and the second period and in the first voltage state in at leastpart of the fourth period is input.

One embodiment of the present invention may be a shift registerincluding a first clock signal line to which the first clock signal isinput, a second clock signal line to which the second clock signal isinput, a third clock signal line to which the third clock signal isinput, a fourth clock signal line to which the fourth clock signal isinput, a first power supply line to which a high power supply voltage issupplied, and a second power supply line to which a low power supplyvoltage is supplied. Each of the first to fourth flip-flops includes afirst transistor including a gate, a source, and a drain, a secondtransistor including a gate, a source, and a drain, and a thirdtransistor including a gate, a source, and a drain. In the firsttransistor, a start signal is input to the gate, and one of the sourceand the drain is electrically connected to the first power supply line.In the second transistor, the gate is electrically connected to theother of the source and the drain of the first transistor, one of thesource and the drain is electrically connected to one of the first tofourth clock signal lines, and an output signal is output through theother of the source and the drain. In the third transistor, one of thesource and the drain is electrically connected to the gate of the secondtransistor, and the other of the source and the drain is electricallyconnected to the second power supply line.

One embodiment of the present invention may be a shift register in whichthe first to third transistors have the same conductivity type.

One embodiment of the present invention may be a shift register in whicheach of the first to third transistors includes an oxide semiconductorlayer serving as a channel formation layer.

One embodiment of the present invention is a display device including adriver circuit having any one of the shift registers described above anda pixel portion having a pixel whose display state is controlled by thedriver circuit.

One embodiment of the present invention is a method for driving a shiftregister including first to fourth flip-flops, including the steps of:inputting a first clock signal, which is in a first voltage state in afirst period and in a second voltage state in second to fourth periods,to the first flip-flop; inputting a second clock signal, which is in thefirst voltage state in at least part of the second period and in thesecond voltage state in at least part of the third period, and thefourth period, to the second flip-flop; inputting a third clock signal,which is in the second voltage state in the first, second, and fourthperiods and in the first voltage state in the third period, to the thirdflip-flop; and inputting a fourth clock signal, which is in the secondvoltage state in at least part of the first period, and the secondperiod and in the first voltage state in at least part of the fourthperiod, to the fourth flip-flop.

According to one embodiment of the present invention, a flip-flop canoperate more selectively, whereby power consumption of a shift registercan be reduced.

BRIEF DESCRIPTION OF DRAWINGS

In the accompanying drawings:

FIG. 1 is a circuit block diagram illustrating an example of a structureof a shift register in Embodiment 1;

FIG. 2 is a timing chart illustrating an example of operation of theshift register illustrated in FIG. 1;

FIG. 3 is a circuit diagram illustrating an example of a circuitstructure of a flip-flop in Embodiment 2;

FIG. 4 is a timing chart illustrating an example of operation of theflip-flop illustrated in FIG. 3;

FIGS. 5A to 5C are examples of structures of transistors which areapplicable to a shift register which is one embodiment of the presentinvention in Embodiment 3;

FIGS. 6A and 6B are another example of a structure of a transistor whichis applicable to a shift register which is one embodiment of the presentinvention in Embodiment 3;

FIGS. 7A and 7B are an example of a structure including a plurality oftransistors, which is applicable to a shift register which is oneembodiment of the present invention in Embodiment 3;

FIGS. 8A to 8D are an example of a method for manufacturing thetransistor illustrated in FIGS. 5A and 5B;

FIGS. 9A and 9B are another example of a structure of a transistor whichis applicable to a shift register which is one embodiment of the presentinvention in Embodiment 4;

FIGS. 10A and 10B are another example of a structure of a transistorwhich is applicable to a shift register which is one embodiment of thepresent invention in Embodiment 5;

FIGS. 11A and 11B each illustrate a block diagram of a display device inEmbodiment 6;

FIGS. 12A and 12B are a view and a timing chart illustrating a structureof a signal line driver circuit in Embodiment 6;

FIGS. 13A to 13C are circuit diagrams illustrating a structure of ashift register in Embodiment 6;

FIG. 14A is a circuit diagram illustrating a structure of a shiftregister in Embodiment 6 and FIG. 14B is a timing chart for describingoperation of a shift register in Embodiment 6;

FIG. 15 is a circuit diagram illustrating a circuit structure of a pixelin a display device in Embodiment 7;

FIGS. 16A and 16B are views illustrating a structure of a pixel in adisplay device in Embodiment 7;

FIGS. 17A1 to 17B2 are views illustrating structures of a pixel in adisplay device in Embodiment 7;

FIG. 18 is a circuit diagram illustrating a circuit structure of a pixelin a display device in Embodiment 8;

FIGS. 19A to 19C each are a cross-sectional view illustrating astructure of a pixel in a display device in Embodiment 8;

FIGS. 20A and 20B illustrate a structure of a display device inEmbodiment 8;

FIG. 21 is a cross-sectional view illustrating a structure of electronicpaper in Embodiment 9;

FIG. 22 illustrates an electronic device to which electronic paper inEmbodiment 9 is applied;

FIGS. 23A1, 23A2 to 23B illustrates structures of a display device inEmbodiment 10;

FIGS. 24A and 24B each illustrate an electronic device in Embodiment 11;

FIGS. 25A and 25B each illustrate an electronic device in Embodiment 11;

FIGS. 26A and 26B each illustrate an electronic device in Embodiment 11;

FIG. 27 illustrates a layout of a pixel portion in a light-emittingdisplay device in Example 1; and

FIG. 28 is a graph showing measurement results of power consumption of alight-emitting display device in Example 1.

BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, embodiments of the present invention will be described withreference to the drawings. Note that the present invention is notlimited to the following description, and it will be easily understoodby those skilled in the art that various changes and modifications canbe made without departing from the spirit and scope of the presentinvention. Thus, the present invention should not be interpreted asbeing limited to the following description of the embodiments.

Embodiment 1

In this embodiment, a shift register which is one embodiment of thepresent invention will be described.

A structure of the shift register in this embodiment is described withreference to FIG. 1. FIG. 1 is a circuit block diagram illustrating anexample of a structure of the shift register in this embodiment.

The shift register in FIG. 1 includes a plurality of clock signal linesand a flip-flop of a plurality of stages including a plurality offlip-flops which are electrically connected to at least one of theplurality of clock signal lines. Each of clock signals input to theplurality of clock signal lines becomes high level and low level at atiming different from one another. Note that FIG. 1 is an example of theshift register including a flip-flop in a first stage (also referred toas a flip-flop 105_1 or FF1) electrically connected to a clock signalline 101, a flip-flop in a second stage (also referred to as a flop-flop105_2 or FF2) electrically connected to a clock signal line 102, aflip-flop in a third stage (also referred to as a flip-flop 105_3 orFF3) electrically connected to a clock signal line 103, a flip-flop in afourth stage (also referred to as a flip-flop 105_4 or FF4) electricallyconnected to a clock signal line 104, a flip-flop in an (n−2)-th stage(n is a natural number of 4 or more) (also referred to as a flip-flop105 _(—) n−2 or FFn−2), a flip-flop in an (n−1)-th stage (also referredto as a flip-flop 105 n−1 or FFn−1), and a flip-flop in an n-th stage(also referred to as a flip-flop 105 n or FFn). However, there is nolimitation and the shift register may include at least a firstflip-flop, a second flip-flop, a third flip-flop, and a fourthflip-flop. Further, the first to fourth flip-flops are not necessarilyadjacent to the flip-flop in the next stage. For example, flip-flops inevery plural stages may be referred to as a first flip-flop, a secondflip-flop, a third flip-flop, and a fourth flip-flop in order.

The clock signal line 101 is a wiring to which a clock signal CK1 isinput. The clock signal CK1 preferably has a duty ratio of 25% or less.Here, description is made assuming the clock signal CK1 has a duty ratioof 25%.

The clock signal line 102 is a wiring to which a clock signal CK2 isinput. The clock signal CK2 preferably has a duty ratio of 25% or less.Here, description is made assuming the clock signal CK2 has a duty ratioof 25%.

The clock signal line 103 is a wiring to which a clock signal CK3 isinput. The clock signal CK3 preferably has a duty ratio of 25% or less.Here, description is made assuming the clock signal CK3 has a duty ratioof 25%.

The clock signal line 104 is a wiring to which a clock signal CK4 isinput. The clock signal CK4 preferably has a duty ratio of 25% or less.Here, description is made assuming the clock signal CK4 has a duty ratioof 25%.

Each of the clock signals CK1 to CK4 can be generated by an AND circuit,for example. For example, two clock signals having different pulsewidths are input to the AND circuit as input signals, whereby in the ANDcircuit, a voltage state is set in accordance with the two input clocksignals and any one of the clock signals CK1 to CK4 is output as anoutput signal. At this time, a duty ratio of the output clock signal canbe set as appropriate in accordance with the pulse widths of the twoinput clock signals.

When a signal SP as a start signal (also referred to as a set signal)and the clock signal CK1 as a clock signal are input to the flip-flop105_1, the flip-flop 105_1 has a function of outputting a signal FF1outas an output signal, whose state is set in accordance with the inputsignal SP and the clock signal CK1.

Note that in this specification, the state of a signal refers to avoltage, a current, or a frequency of the signal, for example.

Note that in general, a voltage refers to the difference betweenpotentials of two points (also referred to as the potential difference).However, both the level of a voltage and the value of a potential arerepresented by volts (V) in a circuit diagram or the like; therefore, itis difficult to distinguish voltage and potential. Thus, in the document(the specification and the scope of claims) of the present application,the phrase “voltage at one point” refers to a potential differencebetween the one point and a reference potential unless otherwisespecified.

Note that as a signal in this specification, an analog signal or adigital signal which uses voltage, current, resistance, frequency, orthe like can be used, for example. For example, as a signal with voltage(also referred to as a voltage signal), it is preferable to use a signalhaving at least a first voltage state and a second voltage state. Abinary digital signal which has a high-level voltage state as the firstvoltage state and a low-level voltage state as the second voltage statecan be used, for example. Note that in a binary digital signal, ahigh-level voltage is also referred to as V_(H) and a low-level voltageis also referred to as V_(L). Moreover, each of a voltage in the firstvoltage state and a voltage in the second voltage state preferably has afixed value. However, since noise or the like, for example, has aninfluence on an electronic circuit, each of the voltage in the firstvoltage state and the voltage in the second voltage state does notnecessarily have a fixed value and may be a value within a fixed range.

Further, in this specification, terms with ordinal numbers such as“first” and “second” are used in order to avoid confusion amongcomponents, and the terms do not limit the components numerically.

When the signal FF1out, which is the output signal of the flip-flop105_1, as a start signal and the clock signal CK2 as a clock signal areinput to the flip-flop 105_2, the flip-flop 105_2 has a function ofoutputting a signal FF2out as an output signal, whose state is set inaccordance with the input signal FF1out and the clock signal CK2.

When the signal FF2out, which is the output signal of the flip-flop105_2, as a start signal and the clock signal CK3 as a clock signal areinput to the flip-flop 105_3, the flip-flop 105_3 has a function ofoutputting a signal FF3out as an output signal, whose state is set inaccordance with the input signal FF2out and the clock signal CK3.

When the signal FF3out, which is the output signal of the flip-flop105_3, as a start signal and the clock signal CK4 as a clock signal areinput to the flip-flop 105_4, the flip-flop 105_4 has a function ofoutputting a signal FF4out as an output signal, whose state is set inaccordance with the input signal FF3out and the clock signal CK4.

Next, as an example of operation (also referred to as a driving method)of the shift register of this embodiment, operation of the flip-flops105_1 to 105_4 is described with reference to FIG. 2. FIG. 2 is a timingchart illustrating an example of operation of the shift register in FIG.1 and illustrates waveforms of the signal SP, the clock signal CK1, theclock signal CK2, the clock signal CK3, the clock signal CK4, the signalFF1out, the signal FF2out, the signal FF3out, and the signal FF4out.Note that in the example of operation of the shift register in FIG. 1,which is described with reference to FIG. 2, the signal SP, the clocksignal CK1, the clock signal CK2, the clock signal CK3, the clock signalCK4, the signal FF1out, the signal FF2out, the signal FF3out, and thesignal FF4out each are a binary digital signal. Further, in theoperation of the shift register in this embodiment, the same operationcan be performed even when the voltage states of the signal SP, theclock signal CK1, the clock signal CK2, the clock signal CK3, the clocksignal CK4, the signal FF1out, the signal FF2out, the signal FF3out, andthe signal FF4out in FIG. 2 are all inverted.

As illustrated in FIG. 2, in the example of the shift register in FIG.1, a period can be divided into a period 111, a period 112, a period113, a period 114, and a period 115. Note that in this specification,the length of each period can be set as appropriate in accordance witheach clock signal, for example. Here, as an example, the length of eachperiod is equal and the operation in each period is described below.

First, at a time A1, the signal SP is set to high level, the clocksignal CK1 is set to low level, the clock signal CK2 is set to lowlevel, the clock signal CK3 is set to low level, and the clock signalCK4 is set to high level. In the period 111, the signal SP is at highlevel, the clock signal CK1 is at low level, the clock signal CK2 is atlow level, the clock signal CK3 is at low level, and the clock signalCK4 is at high level.

At this time, the flip-flop 105_1 is set to a set state. Moreover, thesignal FF1out is set to low level in accordance with the voltage statesof the signal SP and the clock signal CK1. The signal FF2out is set tolow level in accordance with the voltage states of the signal FF1out andthe clock signal CK2. The signal FF3out is set to low level inaccordance with the voltage states of the signal FF2out and the clocksignal CK3. The signal FF4out is set to low level in accordance with thevoltage states of the signal FF3out and the clock signal CK4.

Then, at a time A2, the signal SP is set to low level, the clock signalCK1 is set to high level, the clock signal CK2 remains at low level, theclock signal CK3 remains at low level, and the clock signal CK4 is setto low level. In the period 112, the signal SP is at low level, theclock signal CK1 is at high level, the clock signal CK2 is at low level,the clock signal CK3 is at low level, and the clock signal CK4 is at lowlevel.

At this time, the signal FF1out is set to high level in accordance withthe voltage states of the signal SP and the clock signal CK1. The signalFF2out is at low level in accordance with the voltage states of thesignal FF1out and the clock signal CK2. The signal FF3out is at lowlevel in accordance with the voltage states of the signal FF2out and theclock signal CK3. The signal FF4out is at low level in accordance withthe voltage states of the signal FF3out and the clock signal CK4.

Next, at a time A3, the signal SP remains at low level, the clock signalCK1 is set to low level, the clock signal CK2 is set to high level, theclock signal CK3 remains at low level, and the clock signal CK4 remainsat low level. In the period 113, the signal SP is at low level, theclock signal CK1 is at low level, the clock signal CK2 is at high level,the clock signal CK3 is at low level, and the clock signal CK4 is at lowlevel.

At this time, the signal FF1out is set to low level in accordance withthe voltage states of the signal SP and the clock signal CK1. The signalFF2out is set to high level in accordance with the voltage states of thesignal FF1out and the clock signal CK2. The signal FF3out remains at lowlevel in accordance with the voltage states of the signal FF2out and theclock signal CK3. The signal FF4out remains at low level in accordancewith the voltage states of the signal FF3out and the clock signal CK4.

Next, at a time A4, the signal SP remains at low level, the clock signalCK1 remains at low level, the clock signal CK2 is set to low level, theclock signal CK3 is set to high level, and the clock signal CK4 remainsat low level. In the period 114, the signal SP is at low level, theclock signal CK1 is at low level, the clock signal CK2 is at low level,the clock signal CK3 is at high level, and the clock signal CK4 is atlow level.

At this time, the signal FF1 out remains at low level in accordance withthe voltage states of the signal SP and the clock signal CK1. The signalFF2out is set to low level in accordance with the voltage states of thesignal FF1out and the clock signal CK2. The signal FF3out is set to highlevel in accordance with the voltage states of the signal FF2out and theclock signal CK3. The signal FF4out remains at low level in accordancewith the voltage states of the signal FF3out and the clock signal CK4.

Next, at a time A5, the signal SP remains at low level, the clock signalCK1 remains at low level, the clock signal CK2 remains at low level, theclock signal CK3 is set to low level, and the clock signal CK4 is set tohigh level. In the period 115, the signal SP is at low level, the clocksignal CK1 is at low level, the clock signal CK2 is at low level, theclock signal CK3 is at low level, and the clock signal CK4 is at highlevel.

At this time, the signal FF1out remains at low level in accordance withthe voltage states of the signal SP and the clock signal CK1. The signalFF2out remains at low level in accordance with the voltage states of thesignal FF1out and the clock signal CK2. The signal FF3out is set to lowlevel in accordance with the voltage states of the signal FF2out and theclock signal CK3. The signal FF4out is set to high level in accordancewith the voltage states of the signal FF3out and the clock signal CK4.

As described above, the shift register of this embodiment has astructure in which a plurality of clock signals is input to one offlip-flops with the use of at least a first clock signal (e.g., theclock signal CK1), a second clock signal (e.g., the clock signal CK2), athird clock signal (e.g., the clock signal CK3), and a fourth clocksignal (e.g., the clock signal CK4), each of whose voltage state ischanged at a different timing. Thus, when a flip-flop to which a clocksignal is input is in an operating state (e.g., in a state where ahigh-level signal is input), each of flip-flops to which other signalsare input can be set to a non-operating state (e.g., in a state where alow-level signal is input). Accordingly, power consumption can bereduced.

Embodiment 2

In this embodiment, an example of a circuit structure of a flip-flop ina shift register which is one embodiment of the present invention willbe described.

An example of the circuit structure of the flip-flop of this embodimentis described with reference to FIG. 3. FIG. 3 is a circuit diagramillustrating an example of the circuit structure of the flip-flop inthis embodiment.

The flip-flop in FIG. 3 includes a transistor 311, a transistor 312, atransistor 313, a transistor 314, a transistor 315, and a transistor316. Note that as an example, all the transistors in the flip-flop inthis embodiment have a gate, a source, and a drain, and are field effecttransistors of the same conductivity type. When all the transistors havethe same conductivity type, the number of manufacturing steps can bereduced as compared to the case where transistors with differentconductivity types are used. In FIG. 3, an example in which all thetransistors in the flip-flop are n-channel transistors is illustrated;however, there is no limitation and all the transistors in the flip-flopmay be p-channel transistors.

The gate refers to all or part of a gate electrode and a gate wiring.The gate wiring is a wiring for electrically connecting a gate electrodeof at least one transistor to another electrode or another wiring. Forexample, a scan line in a display device is a gate wiring.

The source refers to all or part of a source region, a source electrode,and a source wiring. The source region is a region in a semiconductorlayer, where the resistivity is lower than that of a channel formationregion (a channel formation layer). The source electrode is part of aconductive layer, which is connected to the source region. The sourcewiring is a wiring for electrically connecting a source electrode of atleast one transistor to another electrode or another wiring. Forexample, in the case where a signal line in a display device iselectrically connected to a source electrode, the signal line is also asource wiring.

The drain refers to all or part of a drain region, a drain electrode,and a drain wiring. The drain region is a region in a semiconductorlayer, where the resistivity is lower than that of a channel formationregion (a channel formation layer). The drain electrode is part of aconductive layer, which is connected to the drain region. The drainwiring is a wiring for electrically connecting a drain electrode of atleast one transistor to another electrode or another wiring. Forexample, in the case where a signal line in a display device iselectrically connected to a drain electrode, the signal line is also adrain wiring.

In addition, in this document (the specification, the scope of claims,the drawings, and the like), a source and a drain of a transistor mayinterchange depending on the structure, the operating conditions, or thelike of the transistor; therefore, it is difficult to define which is asource or a drain. Accordingly, in this document (the specification, thescope of claims, the drawings, and the like), one terminal which isarbitrarily selected from a source and a drain is referred to as one ofthe source and the drain, whereas the other terminal is referred to asthe other of the source and the drain.

In the transistor 311, a signal S31 is input to the gate and a highpower supply voltage VDD is supplied to one of the source and the drain.

In the transistor 312, a signal S32 is input to the gate, one of thesource and the drain is electrically connected to the other of thesource and the drain of the transistor 311, and a low power supplyvoltage VSS is supplied to the other of the source and the drain.

In the transistor 313, the signal S32 is input to the gate and the highpower supply voltage VDD is supplied to one of the source and the drain.

In the transistor 314, the gate is electrically connected to the otherof the source and the drain of the transistor 311, one of the source andthe drain is electrically connected to the other of the source and thedrain of the transistor 313, and the low power supply voltage VSS issupplied to the other of the source and the drain. Note that a portionwhere the gate of the transistor 314 is connected to the other of thesource and the drain of the transistor 311 is also referred to as a node317.

In the transistor 315, a gate is electrically connected to the other ofthe source and the drain of the transistor 313 and the signal S33 isinput to one of a source and a drain. Note that a portion where the gateof the transistor 315 is connected to the other of the source and thedrain of the transistor 313 is also referred to as a node 318.

In the transistor 316, the gate is electrically connected to the otherof the source and the drain of the transistor 311, one of the source andthe drain is electrically connected to the other of the source and thedrain of the transistor 315, and the low power supply voltage VSS issupplied to the other of the source and the drain.

The flip-flop in FIG. 3 outputs the voltage at the other of the sourceand the drain of the transistor 315 as a signal S34.

Note that the signal S31 can function as a start signal SP_(FF) of theflip-flop and corresponds to the signal SP in Embodiment 1, for example.

The signal S32 can function as a reset signal RE_(FF) of the flip-flop.For example, in the case where a flip-flop which follows a flip-flop ofthe following stage is included, the output signal of the flip-flopwhich follows the following stage is input.

The signal S33 can function as a clock signal CK_(FF) of the flip-flopand corresponds to any one of the signals CK1 to CK3 in Embodiment 1,for example.

The signal S34 can function as an output signal OUT_(FF) of theflip-flop and corresponds to any one of the signals FF1out to FFnout inEmbodiment 1, for example.

As illustrated in FIG. 3, one example of the flip-flop of thisembodiment includes at least a first transistor (e.g., the transistor313) in which a start signal is input to a gate and one of a source anda drain is electrically connected to a first power supply line; a secondtransistor (e.g., the transistor 315) in which a gate is electricallyconnected to the other of the source and the drain of the firsttransistor, one of a source and a drain is electrically connected to oneof first to third clock signal lines, and an output signal is outputfrom the other of the source and the drain; and a third transistor(e.g., the transistor 314) in which one of a source and a drain iselectrically connected to the gate of the second transistor and theother of the source and the drain is electrically connected to a secondpower supply line. In this structure, parasitic capacitance might begenerated in each of the transistors in some cases. For example, thesecond transistor is designed to have a wider channel width as comparedto those of the other transistors included in the flip-flop in somecases, resulting in generation of large parasitic capacitance. However,with the structure of the shift register which is one embodiment of thepresent invention, a clock signal in a first voltage state can beselectively output to the flip-flop, whereby power consumption can bereduced.

Next, an example of operation of the flip-flop in this embodiment willbe described with reference to FIG. 4. FIG. 4 is a timing chartillustrating an example of operation of the flip-flop in FIG. 3. Notethat in the example of the operation of the flip-flop in FIG. 3, whichis described with reference to FIG. 4, each of the signals S31 to S34 isa binary digital signal, the high power supply voltage VDD has a valueequal to that of the high-level signal voltage V_(H), and the lowerpower supply voltage VSS has a value equal to that of the low-levelsignal voltage V_(L). Further, in the operation of the flip-flop in thisembodiment, the voltage state of each signal illustrated in FIG. 4 canbe inverted.

In the example of the operation of the flip-flop in FIG. 3, a period canbe divided into a period 351, a period 352, and a period 353 asillustrated in FIG. 4. The operation in each period is described below.

First, in the period 351, at a time E1, the signal S31 is set to highlevel, the signal S32 is set to low level, and the signal S33 is set tolow level.

At this time, the flip-flop in FIG. 3 is set to a set state. Further,the transistor 312 is turned on and the voltage of the node 317 becomesV_(L). Moreover, the transistor 313 is turned on and the voltage of thenode 318 starts to increase. The voltage of the node 318 (also referredto as V₃₁₈) increases to “V_(H)−V_(th313) ^(”) (the threshold voltage ofthe transistor 313). When the voltage of the node 318 reaches“V_(H)−V_(th313)”, the transistor 313 is turned off and the node 318 isset to a floating state. Moreover, when the absolute value of thevoltage of the node 318 becomes larger than the absolute value of thethreshold voltage of the transistor 315 (V_(th315)), the transistor 315is turned on and the signal S34 is set to low level.

Next, in the period 352, at a time E2, the signal S31 is set to lowlevel, the signal S32 is set to high level, and the signal S33 is at lowlevel.

Since the transistor 313 is kept off at this time, the voltage of thenode 318 remains at “V_(H)−V_(th313)”.

When the voltage of the node 318 remains at “V_(H)−V_(th313)”, thetransistor 315 is kept on. When the voltage of one of the source and thedrain of the transistor 315 is at V_(H), the voltage of the other of thesource and the drain of the transistor 315 starts to increase.Accordingly, since the node 318 is in a floating state, the voltage ofthe node 318 starts to increase in accordance with the voltage of anoutput signal because of capacitive coupling of capacitance (e.g.,parasitic capacitance) generated between the gate and the other of thesource and the drain of the transistor 315. This is so-called bootstrapoperation.

The voltage of the node 318 increases to a value larger than the sum ofthe voltage of the node 318 in the period 351 and the threshold voltageof the transistor 315, that is, “V_(H)+V_(th315)+V_(a)” (V_(a) is agiven positive value). At this time, the transistor 315 is kept on andthe signal S34 is set to high level.

Next, in the period 353, at a time E3, the signal S31 is set to lowlevel, the signal S32 is set to low level, and the signal S33 is set tohigh level.

At this time, the transistor 311 is turned on and the voltage of thenode 317 becomes V_(H). Moreover, the transistor 314 is turned on, thevoltage of the node 318 starts to decrease to V_(L), the flip-flop isset to a reset state. The transistor 315 is kept off and the signal S34is kept at low level in the reset state.

As illustrated in FIG. 3 and FIG. 4 as examples, the flip-flop in thisembodiment can be formed field-effect transistors of the sameconductivity type, for example. With the use of the transistors of thesame conductivity type, the number of manufacturing steps can be reducedas compared to the case where transistors with different conductivitytypes are used. Further, even in the case where the flip-flop includesthe transistors of the same conductivity type, power consumption of theshift register of one embodiment of the present invention can bereduced.

Note that this embodiment can be combined with or replaced by any of theother embodiments as appropriate.

Embodiment 3

In this embodiment, an example of a transistor which is applicable tothe shift register of one embodiment of the present invention will bedescribed.

Examples of structures of the transistors in this embodiment will bedescribed with reference to FIGS. 5A to 5C. FIGS. 5A to 5C illustrateexamples of the structures of the transistors in this embodiment. FIG.5A is a top view and FIG. 5B is a cross-sectional view taken along lineZ1-Z2 in FIG. 5A.

The transistor in FIGS. 5A and 5B includes a gate electrode 211, a gateinsulating layer 202, an oxide semiconductor layer 213, a conductivelayer 215 a, and a conductive layer 215 b.

The gate electrode 211 is provided over a substrate 201 as illustratedin FIG. 5B, for example.

The gate insulating layer 202 is provided over the gate electrode 211.

The oxide semiconductor layer 213 is provided over the gate electrode211 with the gate insulating layer 202 therebetween. The oxidesemiconductor layer 213 includes a channel formation region. Moreover,the oxide semiconductor layer 213 is subjected to dehydration ordehydrogenation treatment when formed.

Each of the conductive layer 215 a and the conductive layer 215 b isprovided over part of the oxide semiconductor layer 213. The conductivelayer 215 a and the conductive layer 215 b each function as a sourceelectrode or a drain electrode of the transistor.

Further, as for the transistor in FIGS. 5A and 5B, the oxidesemiconductor layer is subjected to dehydration or dehydrogenationtreatment, and moreover, an oxide insulating layer 218 is formed incontact with part of the oxide semiconductor layer 213. In thetransistor including the oxide semiconductor layer 213 as a channelformation layer, in which the oxide insulating layer 218 is formed afterthe dehydration or dehydrogenation treatment is performed, the Vth shiftdue to long-term use and large load hardly occurs and thus reliabilityis high.

Note that a nitride insulating layer may be provided over the oxideinsulating layer 218. It is preferable that the nitride insulating layerbe in contact with the gate insulating layer 202 provided below theoxide insulating layer 218 or an insulating layer serving as a base, sothat impurities such as moisture, hydrogen ions, and OH⁻ from thevicinity of side surfaces of the substrate are prevented from entering.In particular, it is effective to use a silicon nitride layer for thegate insulating layer 202 in contact with the oxide insulating layer 218or the insulating layer serving as a base. That is, when the siliconnitride layers are provided so as to surround a lower surface, an uppersurface, and side surfaces of the oxide semiconductor layer 213,reliability of the display device is improved.

Further, a planarization insulating layer may be provided over the oxideinsulating layer 218 (over the nitride insulating layer in the casewhere the nitride insulating layer is provided).

Alternatively, as illustrated in FIG. 5C, the transistor 251 may have astructure in which an oxide conductive layer 214 a and an oxideconductive layer 214 b are provided over parts of the oxidesemiconductor layer 213, the conductive layer 215 a is provided so as tobe in contact with the oxide conductive layer 214 a, and the conductivelayer 215 b is provided so as to be in contact with the oxide conductivelayer 214 b.

The oxide conductive layer 214 a and the oxide conductive layer 214 bhave conductivity higher than that of the oxide semiconductor layer 213and function as a source region (also referred to as a low-resistancesource region) and a drain region (also referred to as a low-resistancedrain region) of the transistor 251.

As a material of the oxide conductive film used for forming the oxideconductive layer 214 a and the oxide conductive layer 214 b, aconductive material having a light-transmitting property with respect tovisible light, such as an In—Sn—Zn—O-based metal oxide, anIn—Al—Zn—O-based metal oxide, an Sn—Ga—Zn—O-based metal oxide, anAl—Ga—Zn—O-based metal oxide, an Sn—Al—Zn—O-based metal oxide, anIn—Zn—O-based metal oxide, an Sn—Zn—O-based metal oxide, anAl—Zn—O-based metal oxide, an In—Sn—O-based metal oxide, an In—O-basedmetal oxide, an Sn—O-based metal oxide, or a Zn—O-based metal oxide, canbe employed. The thickness of the oxide conductive film is selected asappropriate in the range of greater than or equal to 1 nm and less thanor equal to 300 nm. In the case of employing a sputtering method, filmdeposition is performed with the use of a target containing SiO₂ atgreater than or equal to 2 wt % and less than or equal to 10 wt %, sothat SiO₂ (x>0) which hinders crystallization is contained in thelight-transmitting conductive film. Thus, it is preferable that thelight-transmitting conductive film be prevented from being crystallizedin heat treatment for dehydration or dehydrogenation performed later.

For example, in the case where an In—Ga—Zn—O-based film is used for theoxide semiconductor layer, the oxide semiconductor layer 213 serving asa channel formation region and the oxide conductive layer 214 a and theoxide conductive layer 214 b can be separately formed under differentdeposition conditions.

For example, in the case where the deposition is performed by asputtering method, the oxide conductive layer 214 a and the oxideconductive layer 214 b which are formed using an oxide semiconductorfilm formed in an argon gas each have n-type conductivity and anactivation energy (ΔE) of 0.01 eV to 0.1 eV inclusive.

Note that in this embodiment, as an example, the oxide conductive layers214 a and 214 b are In—Ga—Zn—O-based films and include at leastamorphous components. Moreover, the oxide conductive layers 214 a and214 b may include crystal grains (also referred to as nanocrystals). Thecrystal grains in the oxide conductive layers 214 a and 214 b have adiameter of approximately 1 nm to 10 nm, typically approximately 2 nm to4 μm.

The oxide conductive layers 214 a and 214 b are not necessarilyprovided, but when the oxide conductive layers 214 a and 214 b areprovided between the oxide semiconductor layer 213 serving as a channelformation layer and the conductive layers 215 a and 215 b serving as asource electrode and a drain electrode, favorable electrical junctionscan be obtained and the transistor 251 can operate stably.

Alternatively, the transistor in FIGS. 5A and 5B may have a structure inFIGS. 6A and 6B, in which a conductive layer 217 is provided over theoxide semiconductor layer 213 with the oxide insulating layer 218therebetween (with the oxide insulating layer 218 and the nitrideinsulating layer therebetween in the case where the nitride insulatinglayer is provided). FIGS. 6A and 6B illustrate an example of thestructure of the transistor in this embodiment. FIG. 6A is a top viewand FIG. 6B is a cross-sectional view taken along line Z1-Z2 in FIG. 6A.The conductive layer 217 functions as a second gate electrode. A secondgate voltage is applied to the conductive layer 217, whereby thethreshold voltage of the transistor 251 can be controlled. In the casewhere a planarization insulating layer is provided, the conductive layer217 can be provided over the planarization insulating layer.

For example, when a voltage equal to or higher than that of the sourceelectrode is applied to the conductive layer 217, the threshold voltageof the transistor is shifted to a negative side; when a voltage lowerthan that of the source electrode is applied to the conductive layer217, the threshold voltage of the transistor is shifted to a positiveside.

As illustrated in FIGS. 5A to 5C and FIGS. 6A and 6B as examples, thetransistors of this embodiment are transistors each including an oxidesemiconductor layer serving as a channel formation layer. Accordingly,the transistors of this embodiment have mobility higher than that of theconventional transistor including an amorphous silicon layer for achannel formation layer, and thus high-speed operation is possible.Further, even when the transistors of this embodiment are used, powerconsumption of the shift register of one embodiment of the presentinvention can be reduced.

One embodiment in the case where a plurality of transistors in FIGS. 5Aand 5C is used will be described with reference to FIGS. 7A and 7B. Asan example, FIGS. 7A and 7B illustrate a structure of the plurality oftransistors which are applicable to the shift register of one embodimentof the present invention. FIG. 7A is a top view and FIG. 7B is across-sectional view taken along line X1-X2 in FIG. 7A.

As an example, the transistor 251 and a transistor 252 are illustratedin FIGS. 7A and 7B. Note that as an example, a structure is illustratedin which an oxide conductive layer is provided between an oxidesemiconductor layer and each of a source electrode and a drainelectrode.

As in FIGS. 5A and 5C, the transistor 251 includes the gate electrode211, the gate insulating layer 202, the oxide semiconductor layer 213,the oxide conductive layer 214 a, the oxide conductive layer 214 b, theconductive layer 215 a, and the conductive layer 215 b.

The gate electrode 211 is provided over the substrate 201 as illustratedin FIG. 7B, for example.

The gate insulating layer 202 is provided over the gate electrode 211.

The oxide semiconductor layer 213 is provided over the gate electrode211 with the gate insulating layer 202 therebetween. The oxidesemiconductor layer 213 is subjected to dehydration or dehydrogenationtreatment.

The oxide conductive layer 214 a and the oxide conductive layer 214 bhave conductivity higher than that of the oxide semiconductor layer 213and function as a source region (also referred to as a low-resistancesource region) and a drain region (also referred to as a low-resistancedrain region) of the transistor 251.

The conductive layer 215 a is provided over the oxide semiconductorlayer 213 with the oxide conductive layer 214 a therebetween and theconductive layer 215 b is provided over the oxide semiconductor layer213 with the oxide conductive layer 214 b therebetween.

The transistor 252 includes a gate electrode 2112, the gate insulatinglayer 202, an oxide semiconductor layer 2132, an oxide conductive layer2142 a, an oxide conductive layer 2142 b, the conductive layer 215 b,and a conductive layer 215 c.

The gate electrode 2112 is formed using the same layer as the gateelectrode 211 and provided over the substrate 201 over which the gateelectrode 211 is also provided.

The oxide semiconductor layer 2132 is formed using the same layer as theoxide semiconductor layer 213 and is subjected to dehydration ordehydrogenation treatment similarly to the oxide semiconductor layer 213when formed.

The oxide conductive layer 2142 a and the oxide conductive layer 2142 bhave conductivity higher than that of the oxide semiconductor layer 2132and function as a source region (also referred to as a low-resistancesource region) and a drain region (also referred to as a low-resistancedrain region) of the transistor 252.

The transistors 251 and 252 in FIGS. 7A and 7B are provided with anoxide insulating layer 218 in contact with part of the oxidesemiconductor layer 213 and part of the oxide semiconductor layer 2132,respectively, in addition to performing dehydration or dehydrogenationtreatment on the oxide semiconductor layers.

Further, the gate electrode 211 of the transistor 251 is in contact withthe conductive layer 215 b in an opening portion formed in the gateinsulating layer 202. Accordingly, favorable contact can be obtained,which leads to reduction in contact resistance. Thus, the number ofopenings can be reduced, which results in reducing the area occupied byopenings. Therefore, a logic circuit (e.g., an inverter) which has thisstructure with the use of two transistors can be formed, for example.

As illustrated in FIGS. 7A and 7B, the shift register of one embodimentof the present invention includes a plurality of transistors, and a gateelectrode of a transistor may be electrically connected to a sourceelectrode or a drain electrode of another transistor in an openingportion formed in a gate insulating layer.

Next, an example of a method for manufacturing the transistorillustrated in FIGS. 5A and 5B is described with reference to FIGS. 8Ato 8D. FIGS. 8A to 8D are cross-sectional views illustrating an exampleof a method for manufacturing the transistor illustrated in FIGS. 5A and5B.

First, the substrate 201 is prepared. A conductive film is formed overthe substrate 201, and then the gate electrode 211 is formed by a firstphotolithography step (see FIG. 8A). Note that side surfaces of the gateelectrode 211 are preferably tapered. When the side surfaces of the gateelectrode 211 are tapered, adhesion between the gate electrode 211 and afilm formed on and in contact with the gate electrode 211 can beincreased.

The substrate 201 needs to have an insulating surface and heatresistance high enough to withstand at least heat treatment to beperformed later. As the substrate 201, a glass substrate or the like canbe used, for example.

As the glass substrate, in the case where the temperature of the heattreatment to be performed later is high, the one whose strain point is730° C. or higher is preferably used. As the glass substrate, a glassmaterial such as aluminosilicate glass, aluminoborosilicate glass, orbarium borosilicate glass is used. Note that by containing a largeramount of barium oxide (BaO) than boron oxide, more practicalheat-resistant glass can be obtained. Therefore, a glass substratecontaining BaO and B₂O₃ so that the amount of BaO is larger than that ofB₂O₃ is preferably used.

Note that a substrate formed of an insulator, such as a ceramicsubstrate, a quartz substrate, or a sapphire substrate may be used forthe substrate 201, instead of the glass substrate. Alternatively, acrystallized glass substrate or the like may be used.

An insulating film serving as a base film may be provided between thesubstrate 201 and the gate electrode 211. The base film has a functionof preventing diffusion of an impurity element from the substrate 201and can be formed to have a single-layer structure or a layeredstructure of one or more of a silicon nitride film, a silicon oxidefilm, a silicon nitride oxide film, and a silicon oxynitride film.

As an example of a material of the conductive film for forming the gateelectrode 211, a metal material such as molybdenum, titanium, chromium,tantalum, tungsten, aluminum, copper, neodymium, or scandium or an alloymaterial containing any of these materials as a main component can beused. The conductive film for forming the gate electrode 211 can beformed with a single film containing one or more of these materials or astacked film thereof.

As the conductive film for forming the gate electrode 211, for example,a stacked film of three layers in which a titanium film, an aluminumfilm, and a titanium film are stacked in this order, or a stacked filmof three layers in which a molybdenum film, an aluminum film, and amolybdenum film are stacked in this order is preferably used. Needlessto say, a single-layer film, a stacked film of two layers, or a stackedfilm of four or more layers may also be used as the conductive film.When a stacked conductive film of a titanium film, an aluminum film, anda titanium film is used as the conductive film, etching can be performedby a dry etching method with the use of a chlorine gas.

Next, the gate insulating layer 202 is formed over the gate electrode211.

The gate insulating layer 202 can be formed to have a single layer of asilicon oxide layer, a silicon nitride layer, a silicon oxynitridelayer, or a silicon nitride oxide layer or a stacked layer thereof by aplasma CVD method, a sputtering method, or the like. For example, when asilicon oxynitride layer is formed, a silicon oxynitride layer may beformed by a plasma CVD method with the use of SiH₄, oxygen, and nitrogenas a deposition gas. The thickness of the gate insulating layer 202 isgreater than or equal to 100 mn and less than or equal to 500 nm; in thecase where the gate insulating layer 202 is formed using a stackedlayer, for example, a first gate insulating layer with a thickness ofgreater than or equal to 50 nm and less than or equal to 200 nm and asecond gate insulating layer with a thickness of greater than or equalto 5 mn and less than or equal to 300 mn are stacked. When a siliconoxide film which is formed using a silicon target doped with phosphorusor boron is used for the gate insulating layer 202, entry of impurities(such as moisture, hydrogen ions, and OH⁻) can be suppressed.

In this embodiment, the gate insulating layer 202 is formed using asilicon nitride film with a thickness of 200 nm by a plasma CVD methodas an example.

Next, an oxide semiconductor film is formed over the gate insulatinglayer 202. The thickness of the oxide semiconductor film is preferablygreater than or equal to 2 nm and less than or equal to 200 nm. Forexample, when the thickness of the oxide semiconductor film is as smallas 50 nm or less, the oxide semiconductor film can be in an amorphousstate even when heat treatment for dehydration or dehydrogenation isperformed after formation of the oxide semiconductor film. By making thethickness of the oxide semiconductor film small, crystallization of theoxide semiconductor film can be suppressed when heat treatment isperformed after the formation of the oxide semiconductor film.

Note that before the oxide semiconductor film is formed by a sputteringmethod, particles (also referred to as powdery substances or dustgenerated in film formation) which are attached on a surface of the gateinsulating layer may be removed by reverse sputtering in which an argongas is introduced and plasma is generated. The reverse sputtering refersto a method in which, without application of a voltage to a target side,an RF power source is used for application of a voltage to a substrateside in an argon atmosphere so that plasma is generated in the vicinityof the substrate to modify a surface. Note that instead of an argonatmosphere, a nitrogen atmosphere, a helium atmosphere, an oxygenatmosphere, or the like may be used.

As the oxide semiconductor film, any of the following can be used: anIn—Ga—Zn—O-based oxide semiconductor film, an In—Sn—Zn—O-based oxidesemiconductor film, an In—Al—Zn—O-based oxide semiconductor film, anSn—Ga—Zn—O-based oxide semiconductor film, an Al—Ga—Zn—O-based oxidesemiconductor film, an Sn—Al—Zn—O-based oxide semiconductor film, anIn—Zn—O-based oxide semiconductor film, an Sn—Zn—O-based oxidesemiconductor film, an Al—Zn—O-based oxide semiconductor film, anIn—Sn—O-based oxide semiconductor film, an In—O-based oxidesemiconductor film, an Sn—O-based oxide semiconductor film, and aZn—O-based oxide semiconductor film. In this embodiment, the oxidesemiconductor film is formed using an In—Ga—Zn—O-based oxidesemiconductor target by a sputtering method. Alternatively, the oxidesemiconductor film can be formed by a sputtering method in a rare gas(typically, argon) atmosphere, an oxygen atmosphere, or a mixedatmosphere of a rare gas (typically, argon) and oxygen. In the case ofemploying a sputtering method, film deposition may be performed using atarget containing SiO₂ at 2 wt % to 10 wt % inclusive and SiOx (x>0)which hinders crystallization may be contained in the oxidesemiconductor film. Accordingly, crystallization of the oxidesemiconductor layer to be formed later can be suppressed in heattreatment for dehydration or dehydrogenation which is to be performedlater.

Here, the oxide semiconductor film is formed using an oxidesemiconductor target for film deposition including In, Ga, and Zn (at acomposition ratio of In₂O₃:Ga₂O₃:ZnO=1:1:1 [molar ratio]) under thefollowing condition: the distance between the substrate and the targetis 100 mm, the pressure is 0.6 Pa, the direct-current (DC) power supplyis 0.5 kW, and the atmosphere is oxygen (the proportion of the oxygenflow is 100%). Note that a pulse direct-current (DC) power supply ispreferable because powder substances generated at the time of filmdeposition can be reduced and the film thickness can be made uniform. Inthis embodiment, as the oxide semiconductor film, an In—Ga—Zn—O-basednon-single-crystal film is formed by a sputtering method with the use ofan In—Ga—Zn—O-based oxide semiconductor target for film deposition.

Examples of a sputtering method include an RF sputtering method in whicha high frequency power source is used for a sputtering power source, aDC sputtering method in which a direct-current power source is used fora sputtering power source, and a pulsed DC sputtering method in which abias is applied in a pulsed manner. An RF sputtering method is mainlyused in the case where an insulating film is formed, and a DC sputteringmethod is mainly used in the case where a metal conductive film isformed.

Further, there is also a multi-source sputtering apparatus in which aplurality of targets of different materials can be set. With themulti-source sputtering apparatus, films of different materials can beformed to be stacked in the same chamber, or a film of plural kinds ofmaterials can be formed by electric discharge at the same time in thesame chamber.

Moreover, there are a sputtering apparatus provided with a magnet systeminside a chamber and used for a magnetron sputtering method, and asputtering apparatus used for an ECR sputtering method in which plasmagenerated with the use of microwaves is used without using glowdischarge.

As a film deposition method employing a sputtering method, there are areactive sputtering method in which a target substance and a sputteringgas component are chemically reacted with each other during filmformation to form a thin film of a compound thereof, and a biassputtering method in which voltage is also applied to a substrate duringfilm deposition.

As an evacuation means of the deposition chamber where sputtering isperformed, a cryopump is preferably used. When the cryopump is used forevacuation, impurities such as moisture in the deposition chamber can beremoved.

Next, the oxide semiconductor film is processed into an island shape bya second photolithography step to form the oxide semiconductor layer 213(see FIG. 8B). Note that after the second photolithography step, theoxide semiconductor layer 213 may be subjected to heat treatment (athigher than or equal to 400° C. and lower than 750° C.) in an inert gasatmosphere (e.g., nitrogen, helium, neon, or argon) so that impuritiessuch as hydrogen and water contained in the layer are removed.

Next, the oxide semiconductor layer is dehydrated or dehydrogenated.First heat treatment for dehydration or dehydrogenation is performed ata temperature higher than or equal to 400° C. and lower than 750° C.,preferably higher than or equal to 425° C. and lower than 750° C. Notethat in the case of the temperature that is 425° C. or higher, the heattreatment time may be one hour or shorter, whereas in the case of thetemperature lower than 425° C., the heat treatment time is longer thanone hour. In this embodiment, the substrate is introduced into anelectric furnace, which is one of heat treatment apparatuses, and heattreatment is performed on the oxide semiconductor layer in a nitrogenatmosphere. Then, the oxide semiconductor layer is not exposed to air,which prevents entry of water and hydrogen into the oxide semiconductorlayer again, so that the oxide semiconductor layer is obtained. In thisembodiment, slow cooling is performed from the heating temperature T atwhich the oxide semiconductor layer is subjected to dehydration ordehydrogenation to a temperature low enough to prevent water fromentering again, specifically to a temperature that is lower than theheating temperature T by 100° C. or more, in a nitrogen atmosphere andin one furnace. The atmosphere is not limited to a nitrogen atmosphere,and dehydration or dehydrogenation may be performed in an inert gasatmosphere such as helium, neon, or argon.

Note that the heat treatment apparatus is not limited to an electricfurnace, and may have a device for heating an object by heat conductionor heat radiation from a heating element such as a resistance heatingelement. For example, a rapid thermal anneal (RTA) apparatus such as agas rapid thermal anneal (GRTA) apparatus or a lamp rapid thermal anneal(LRTA) apparatus can be used. An LRTA apparatus is an apparatus forheating an object to be processed by radiation of light (anelectromagnetic wave) emitted from a lamp such as a halogen lamp, ametal halide lamp, a xenon arc lamp, a carbon arc lamp, a high pressuresodium lamp, or a high pressure mercury lamp. A GRTA apparatus is anapparatus for performing heat treatment with a high-temperature gas. Asthe gas, an inert gas which hardly reacts with an object to be processedby heat treatment is used. For example, nitrogen or a rare gas such asargon is used.

When the oxide semiconductor layer is subjected to heat treatment at atemperature of higher than or equal to 400° C. and lower than 750° C.,the dehydration or dehydrogenation of the oxide semiconductor layer canbe achieved; thus, water (H₂O) can be prevented from being containedagain in the oxide semiconductor layer later.

Note that it is preferable that in the first heat treatment, water,hydrogen, and the like be not contained in nitrogen or a rare gas suchas helium, neon, or argon. In the first heat treatment, the purity ofnitrogen or a rare gas such as helium, neon, or argon which isintroduced into the heat treatment apparatus is preferably greater thanor equal to 6N (99.9999%), more preferably greater than or equal to 7N(99.99999%) (i.e., the impurity concentration is preferably less than orequal to 1 ppm, more preferably less than or equal to 0.1 ppm).

The oxide semiconductor layer becomes a microcrystalline layer, ananocrystalline layer, or a polycrystalline layer by crystallization insome cases, depending on conditions of the first heat treatment or amaterial of the oxide semiconductor layer. For example, the oxidesemiconductor layer may crystallize to become a microcrystallinesemiconductor layer having a crystallinity of 90% or more, or 80% ormore. Further, depending on conditions of the first heat treatment or amaterial of the oxide semiconductor layer, the oxide semiconductor layermay become an amorphous oxide semiconductor layer containing nocrystalline component.

The oxide semiconductor layers are changed into oxygen-deficient andlow-resistance oxide semiconductor layers, i.e., n-type low-resistanceoxide semiconductor layers, after the first heat treatment. The oxidesemiconductor layer after the first heat treatment has a higher carrierconcentration than the oxide semiconductor layer shortly after theformation and preferably has a carrier concentration of 1×10¹⁸/cm³ ormore.

The first heat treatment can be performed on the oxide semiconductorfilm which has not been processed into the island-shaped oxidesemiconductor layer. In that case, the substrate is taken out of theheat treatment apparatus after the first heat treatment, and then aphotolithography step is performed.

Next, a conductive film for forming the source electrode and the drainelectrode of the transistor is formed over the gate insulating layer 202and the oxide semiconductor layer 213.

For the conductive film, an element selected from Ti, Mo, W, Al, Cr, Cu,and Ta, an alloy containing any of these elements as a component, analloy containing these elements in combination, or the like is used. Theconductive film is not limited to a single layer including the aboveelement and can be formed in a stacked layer of two or more layers. Inthis embodiment, a three-layer conductive film in which a titanium film(with a thickness of 100 nm), an aluminum film (with a thickness of 200nm), and a titanium film (with a thickness of 100 nm) are stacked isformed. Instead of a Ti film, a titanium nitride film may be used.

In the case where heat treatment at 200° C. to 600° C. is performed, itis preferable that the conductive film have heat resistance high enoughto withstand the heat treatment. For example, it is preferable to use analuminum alloy to which an element which prevents hillocks is added or aconductive film stacked with a heat-resistance conductive film. As theformation method of the conductive film, a sputtering method, a vacuumevaporation method (e.g., an electron beam evaporation method), an arcdischarge ion plating method, or a spray method is used. Alternatively,the conductive film may be formed by discharging a conductive nanopasteof silver, gold, copper, or the like by a screen printing method, anink-jet method, or the like and baking the nanopaste.

Next, a third photolithography step is performed. A resist mask 233 aand a resist mask 233 b are formed over the conductive film for formingthe source electrode and the drain electrode, and part of the conductivefilm is selectively etched with the use of the resist mask 233 a and theresist mask 233 b, so that the conductive layer 215 a and the conductivelayer 215 b are formed (see FIG. 8C).

In the third photolithography step, only part of the conductive filmwhich are on and in contact with the oxide semiconductor layer isselectively removed. For example, when an ammonia peroxide mixture(hydrogen peroxide:ammonia:water=5:2:2 in a weight ratio) or the like isused as an alkaline etchant in order to selectively remove only part ofthe metal conductive film, which is on and in contact with theIn—Ga—Zn—O-based oxide semiconductor layer, the metal conductive filmcan be selectively removed, and the oxide semiconductor layer formed ofan oxide semiconductor can be left.

In the third photolithography step, an exposed region of the oxidesemiconductor layer is etched in some cases depending on an etchingcondition. In that case, a region of the oxide semiconductor layer,which is sandwiched between the source electrode and the drain electrode(a region sandwiched between the conductive layer 215 a and theconductive layer 215 b) is thinner than a region of the oxidesemiconductor layer, which overlaps with the source electrode or thedrain electrode over the gate electrode 211.

Next, the oxide insulating layer 218 is formed over the gate insulatinglayer 202 and the oxide semiconductor layer 213. At this stage, part ofthe oxide semiconductor layer 213 is in contact with the oxideinsulating layer 218. Note that a region of the oxide semiconductorlayer, which overlaps with the gate electrode with the gate insulatinglayer therebetween, is a channel formation region.

The oxide insulating layer 218 can be formed to have a thickness of 1 mnor more by a method with which impurities such as water and hydrogen arenot mixed into the oxide insulating layer, such as a sputtering method,as appropriate. In this embodiment, a silicon oxide film is formed asthe oxide insulating layer by a sputtering method. The substratetemperature in deposition may be higher than or equal to roomtemperature and lower than or equal to 300° C. The substrate temperatureis 100° C. in this embodiment. The silicon oxide film can be formed by asputtering method in a rare gas (typically argon) atmosphere, an oxygenatmosphere, or an atmosphere containing a rare gas (typically argon) andoxygen. Moreover, a silicon oxide target or a silicon target can be usedas a target. For example, with the use of a silicon target, a siliconoxide film can be formed by a sputtering method in an atmospherecontaining oxygen and a rare gas. The oxide insulating layer which isformed in contact with the oxide semiconductor layer 213 whoseresistance is reduced is formed using an inorganic insulating film whichdoes not contain impurities such as moisture, hydrogen ions, and OH⁻ andblocks entry of such impurities from the outside; a silicon oxide film,a silicon nitride oxide film, an aluminum oxide film, an aluminumoxynitride film, or the like is typically used. Note that an oxideinsulating layer formed by a sputtering method is particularly dense,and even a single layer can be used as a protective film for suppressinga phenomenon in which impurities are diffused into a layer in contacttherewith. Further, a target doped with phosphorus (P) or boron (B) canbe used so that phosphorus (P) or boron (B) is added to the oxideinsulating layer.

In this embodiment, the film deposition is performed by a pulsed DCsputtering method using a columnar polycrystalline, boron-doped silicontarget which has a purity of 6N (the resistance value is 0.01 Ω·cm), inwhich the distance between the substrate and the target (T-S distance)is 89 mm, the pressure is 0.4 Pa, the direct-current (DC) power sourceis 6 kW, and the atmosphere is oxygen (the proportion of the oxygen flowis 100%). The film thickness is 300 nm.

The oxide insulating layer 218 is provided on and in contact with thechannel formation region of the oxide semiconductor layer and alsofunctions as a channel protective layer.

Next, second heat treatment (preferably at higher than or equal to 200°C. and lower than or equal to 400° C., for example, at higher than orequal to 250° C. and lower than or equal to 350° C.) may be performed inan inert gas atmosphere (e.g., a nitrogen atmosphere). For example, thesecond heat treatment is performed in a nitrogen atmosphere at 250° C.for one hour. When the second heat treatment is performed, the oxidesemiconductor layer 213 is heated while part thereof is in contact withthe oxide insulating layer 218 and other parts thereof are in contactwith the conductive layer 215 a and the conductive layer 215 b.

When the second heat treatment is performed while the oxidesemiconductor layer 213 whose resistance is reduced in the first heattreatment is in contact with the oxide insulating layer 218, the regionin contact with the oxide insulating layer 218 becomes in anoxygen-excess state. Accordingly, the region of the oxide semiconductorlayer 213, which is in contact with the oxide insulating layer 218,becomes an i-type (increases resistance) in a depth direction of theoxide semiconductor layer 213 (see FIG. 8D).

The timing of performing the second heat treatment is not limited to thetiming shortly after the third photolithography step as long as it isafter the third photolithography step.

Thus, the transistor of this embodiment can be manufactured.

Note that this embodiment can be combined as appropriate with any of theother embodiments.

Embodiment 4

In this embodiment, another example of a transistor which is applicableto a shift register of one embodiment of the present invention will bedescribed.

An example of a structure of the transistor of this embodiment will bedescribed with reference to FIGS. 9A and 9B. FIGS. 9A and 9B illustratean example of a structure of the transistor of this embodiment. FIG. 9Ais a top view and FIG. 9B is a cross-sectional view taken along lineZ1-Z2 in FIG. 9A.

As in the transistors in FIGS. 5A to 5C, the transistor in FIGS. 9A and9B includes the gate electrode 211, the gate insulating layer 202, theoxide semiconductor layer 213, the conductive layer 215 a, and theconductive layer 215 b.

The gate electrode 211 is provided over the substrate 201 as illustratedin FIG. 9B, for example.

The gate insulating layer 202 is formed over the gate electrode 211.

The conductive layer 215 a and the conductive layer 215 b are eachprovided over part of the gate insulating layer 202.

The oxide semiconductor layer 213 is provided over the gate electrode211, the conductive layer 215 a, and the conductive layer 215 b with thegate insulating layer 202 therebetween. The oxide semiconductor layer213 is subjected to dehydration or dehydrogenation treatment whenformed.

Further, as for the transistor in FIGS. 9A and 9B, the oxidesemiconductor layer is subjected to dehydration or dehydrogenationtreatment, and moreover, the oxide insulating layer 218 is formed incontact with part of the oxide semiconductor layer 213.

Note that a nitride insulating layer may be provided over the oxideinsulating layer 218. It is preferable that the nitride insulating layerbe in contact with the gate insulating layer 202 provided below theoxide insulating layer 218 or an insulating layer serving as a base, sothat impurities such as moisture, hydrogen ions, and OH⁻ from thevicinity of side surfaces of the substrate are prevented from entering.In particular, it is effective to use a silicon nitride layer for thegate insulating layer 202 in contact with the oxide insulating layer 218or the insulating layer serving as a base. That is, when the siliconnitride layers are provided so as to surround a lower surface, an uppersurface, and side surfaces of the oxide semiconductor layer 213,reliability of the display device is improved.

Further, a planarization insulating layer may be provided over the oxideinsulating layer 218 (over the nitride insulating layer in the casewhere the nitride insulating layer is provided).

As in FIGS. 6A and 6B, the transistor 251 in FIGS. 9A and 9B may have astructure in which a conductive layer is provided over the oxideinsulating layer 218 (over the planarization insulating layer in thecase where the planarization insulating layer is provided) so that theoxide insulating layer 218 is sandwiched between the conductive layerand the oxide semiconductor layer 213. The conductive layer serves as asecond gate electrode. Second gate voltage is applied to the conductivelayer, whereby the threshold voltage of the transistor 251 can becontrolled.

Note that the planarization insulating layer is not necessarilyprovided. When the planarization insulating layer is not provided, aconductive layer serving as a second gate electrode can be formed overthe oxide insulating layer 218 (over the nitride insulating layer in thecase where the nitride insulating layer is formed).

For example, when a voltage which is higher than or equal to the voltageof the source electrode is applied to the conductive layer serving as asecond gate electrode, the threshold voltage of the transistor shifts ina negative direction. When a voltage which is lower than the voltage ofthe source electrode is applied to the conductive layer serving as asecond gate electrode, the threshold voltage of the transistor shifts ina positive direction.

Alternatively, the transistor of this embodiment can have a structure inwhich the oxide conductive layer 214 a is provided between the oxidesemiconductor layer 213 and the conductive layer 215 a and the oxideconductive layer 214 b is provided between the oxide semiconductor layer213 and the conductive layer 215 b, as in the transistor 251 in FIG. 5C.

As illustrated in FIGS. 9A and 9B, the transistor of this embodiment isa so-called bottom-contact transistor in which an oxide semiconductorlayer is provided over a source electrode or a drain electrode.Therefore, high-speed operation can be performed since the transistor ofthis embodiment has higher mobility than that of the conventionaltransistor which includes amorphous silicon for a channel formationlayer. Further, even when the transistor of this embodiment is used,power consumption of the shift register of one embodiment of the presentinvention can be reduced. Furthermore, the bottom-contact transistor isapplied, so that an area where the oxide semiconductor layer is incontact with the conductive layer serving as the source electrode or thedrain electrode can be increased and peeling or the like can beprevented.

Embodiment 5

In this embodiment, another example of a transistor which is applicableto a shift register of one embodiment of the present invention will bedescribed.

The example of the structure of the transistor of this embodiment willbe described with reference to FIGS. 10A and 10B. FIGS. 10A and 10Billustrate an example of the structure of the transistor in thisembodiment. FIG. 1 OA is a top view and FIG. 10B is a cross-sectionalview taken along line Z1-Z2 in FIG. 10A.

As in the transistors illustrated in FIGS. 5A to 5C, FIGS. 6A and 6B,and FIGS. 9A and 9B, the transistor in FIGS. 10A and 10B includes thegate electrode 211, the gate insulating layer 202, the oxidesemiconductor layer 213, the conductive layer 215 a, and the conductivelayer 215 b.

The gate electrode 211 is provided over the substrate 201 as illustratedin FIG. 10B, for example.

The gate insulating layer 202 is provided over the gate electrode 211.

The oxide semiconductor layer 213 is provided over the gate electrode211 with the gate insulating layer 202 therebetween. Further, the oxidesemiconductor layer 213 is subjected to dehydration or dehydrogenationtreatment when formed.

Further, as for the transistor in FIGS. 10A and 10B, the oxidesemiconductor layer is subjected to dehydration or dehydrogenationtreatment, and moreover, the oxide insulating layer 218 is provided incontact with part of the oxide semiconductor layer 213. The oxideinsulating layer 218 in FIGS. 10A and 10B serves as a channel protectivelayer.

The conductive layer 215 a and the conductive layer 215 b are eachprovided over parts of the oxide semiconductor layer 213 and the oxideinsulating layer 218. Each of the conductive layer 215 a and theconductive layer 215 b serves as a source electrode or a drainelectrode.

Note that a nitride insulating layer may be provided over the oxideinsulating layer 218. It is preferable that the nitride insulating layerbe in contact with the gate insulating layer 202 provided below theoxide insulating layer 218 or an insulating layer serving as a base, sothat impurities such as moisture, hydrogen ions, and OH⁻ from thevicinity of side surfaces of the substrate are prevented from entering.In particular, it is effective to use a silicon nitride layer for thegate insulating layer 202 in contact with the oxide insulating layer 218or the insulating layer serving as a base. That is, when the siliconnitride layers are provided so as to surround a lower surface, an uppersurface, and side surfaces of the oxide semiconductor layer 213,reliability of the display device is improved.

Further, a planarization insulating layer may be provided over the oxideinsulating layer 218 (over the nitride insulating layer in the casewhere the nitride insulating layer is provided).

Further, a conductive layer may be provided over the oxide insulatinglayer 218 (over the planarization insulating layer in the case where theplanarization insulating layer is provided) so that the oxide insulatinglayer 218 is sandwiched between the conductive layer and the oxidesemiconductor layer 213. The conductive layer serves as a second gateelectrode. Second gate voltage is applied to the conductive layer,whereby the threshold voltage of the transistor 251 can be controlled.

Note that the planarization insulating layer is not necessarilyprovided. When the planarization insulating layer is not provided, aconductive layer serving as a second gate electrode can be formed overthe oxide insulating layer 218 (over the nitride insulating layer in thecase where the nitride insulating layer is formed).

For example, when a voltage which is higher than or equal to the voltageof the source electrode is applied to the conductive layer serving as asecond gate electrode, the threshold voltage of the transistor shifts ina negative direction. When a voltage which is lower than the voltage ofthe source electrode is applied to the conductive layer serving as asecond gate electrode, the threshold voltage of the transistor shifts ina positive direction.

Further, as in the transistor 251 in FIG. 5C, a transistor of thisembodiment may have a structure in which a pair of oxide conductivelayers serving as buffer layers is provided over parts of the oxidesemiconductor layer 213 of the transistor, and a pair of electrodes ofthe conductive layer 215 a and the conductive layer 215 b is provided soas to be in contact with the pair of the oxide conductive layers.

As described above, the transistor of this embodiment is a so-calledchannel protective transistor including an insulating layer serving as achannel protective layer formed over part of an oxide semiconductorlayer. Therefore, high-speed operation can be performed since thetransistor of this embodiment has higher mobility than that of theconventional transistor which includes amorphous silicon for a channelformation layer. Further, even when the transistor of this embodiment isused, power consumption of the shift register of one embodiment of thepresent invention can be reduced.

Note that this embodiment can be combined as appropriate with any of theother embodiments.

Embodiment 6

In this embodiment, a display device in which the shift register, whichis one embodiment of the present invention, is used in a driver circuitwill be described. Note that in this embodiment, as an example, adisplay device including at least part of a driver circuit and a pixelportion including pixel whose display state is controlled by the drivercircuit over one substrate will be described.

FIG. 11A illustrates an example of a block diagram of an active matrixdisplay device. The display device includes a pixel portion 5301, afirst scan line driver circuit 5302, a second scan line driver circuit5303, and a signal line driver circuit 5304 over a substrate 5300. Inthe pixel portion 5301, a plurality of signal lines which are extendedfrom the signal line driver circuit 5304 and a plurality of scan lineswhich are extended from the first scan line driver circuit 5302 and thesecond scan line driver circuit 5303 are provided. Note that pixelswhich include display elements are arranged in matrix in regions wherethe scan lines and the signal lines are crossed. In addition, thesubstrate 5300 of the display device is connected to a timing controlcircuit 5305 (also referred to as a controller or a control IC) througha connection portion such as a flexible printed circuit (FPC).

In FIG. 11A, the first scan line driver circuit 5302, the second scanline driver circuit 5303, and the signal line driver circuit 5304 areformed over the same substrate 5300 as the pixel portion 5301.Therefore, the number of components of a driver circuit which isprovided outside and the like is reduced, which leads to cost reduction.Further, in the case where a driver circuit is provided outside thesubstrate 5300, a wiring need to be extended and the number ofconnections of wirings is increased. On the other hand, in the casewhere a driver circuit is provided over the substrate 5300, the numberof connection of wirings can be reduced, which leads to improvement inreliability or improvement in a yield.

The timing control circuit 5305 supplies, for example, a first scan linedriver circuit start signal (GSP1) and a first scan line driver circuitclock signal (GCK1) to the first scan line driver circuit 5302. Thetiming control circuit 5305 supplies, for example, a second scan linedriver circuit start signal (GSP2) and a second scan line driver circuitclock signal (GCK2) to the second scan line driver circuit 5303. Thetiming control circuit 5305 supplies, for example, a signal line drivercircuit start signal (SSP), a signal line driver circuit clock signal(SCK), video signal data (DATA, also simply referred to as a videosignal), and a latch signal (LAT) to the signal line driver circuit5304. Note that each clock signal may be a plurality of clock signalswhose phases are shifted or may be supplied together with an invertedclock signal (CKB) which is obtained by inverting the clock signal. Notethat one of the first scan line driver circuit 5302 and the second scanline driver circuit 5303 can be eliminated.

FIG. 11B illustrates a structure in which the first scan line drivercircuit 5302 and the second scan line driver circuit 5303 are formedover the same substrate 5300 as the pixel portion 5301 and the signalline driver circuit 5304 is formed over a substrate which is differentfrom the pixel portion 5301. With such a structure, increase in size ofthe display device, reduction in the number of manufacturing steps,reduction in cost, improvement in yield, or the like can be achieved.

FIGS. 12A and 12B illustrate an example of a structure and operation ofa signal line driver circuit which is formed using n-channel TFTs.

The signal line driver circuit includes a shift register 5601 and aswitching circuit 5602. The switching circuit 5602 includes a pluralityof switching circuits 5602_1 to 5602_N (N is a natural number of greaterthan or equal to 2). The switching circuits 5602_1 to 5602_N eachinclude a plurality of thin film transistors 5603_1 to 5603 _(—) k (k isa natural number of greater than or equal to 2). An example where thethin film transistors 5603_1 to 5603 _(—) k are n-channel TFTs isdescribed.

A connection relation in the signal line driver circuit is describedtaking the switching circuit 5602_1 as an example. One of a source and adrain of each of the thin film transistors 5603_1 to 5603 _(—) k iselectrically connected to one of wirings 5604_1 to 5604 _(—) k. Theother of the source and the drain of each of the thin film transistors5603_1 to 5603 _(—) k is electrically connected to one of signal linesS1 to Sk. Gates of the thin film transistors 5603_1 to 5603 _(—) k areelectrically connected to a wiring 5605_1.

The shift register 5601 has a function of sequentially outputting highlevel signals to the wirings 5605_1 to 5605_N and sequentially selectingthe switching circuits 5602_1 to 5602_N.

The switching circuit 5602_1 has a function of controlling a conductionstate between the wirings 5604_1 to 5604 _(—) k and the signal lines S1to Sk, that is, a function of controlling whether voltages of thewirings 5604_1 to 5604 _(—) k are supplied to the signal lines S1 to Sk.In this manner, the switching circuit 5602_1 functions as a selector.Further, the thin film transistors 5603_1 to 5603 _(—) k each havefunctions of controlling conduction states between the wirings 5604_1 to5604 _(—) k and the signal lines S1 to Sk, that is, functions ofsupplying the voltages of the wirings 5604_1 to 5604 _(—) k to thesignal lines S1 to Sk. In this manner, each of the thin film transistors5603_1 to 5603 _(—) k functions as a switch.

Note that video signal data (DATA) is input to each of the wirings5604_1 to 5604 _(—) k. The video signal data (DATA) is an analog signalcorresponding to an image signal or image data in many cases.

Next, operation of the signal line driver circuit in FIG. 12A isdescribed with reference to a timing chart in FIG. 12B. FIG. 12Billustrates examples of signals Sout_1 to Sout_N and signals Vdata_1 toVdata_k. The signals Sout_1 to Sout_N are examples of output signalsfrom the shift register 5601, and the signals Vdata_1 to Vdata_k areexamples of signals input to the wirings 5604_1 to 5604 _(—) k. Notethat one operation period of the signal line driver circuit correspondsto one gate selection period in a display device. For example, one gateselection period is divided into periods T1 to TN. Each of the periodsT1 to TN is a period during which the video signal data (DATA) iswritten to pixels in a selected row.

In the periods T1 to TN, the shift register 5601 sequentially outputsH-level signals to the wirings 5605_1 to 5605_N. For example, in theperiod T1, the shift register 5601 outputs the high level signal to thewiring 5605_1. Then, the thin film transistors 5603_1 to 5603 _(—) k areturned on, so that the wirings 5604_1 to 5604 _(—) k and the signallines S1 to Sk are brought into conduction. In this case, Data (S1) toData (Sk) are input to the wirings 5604_1 to 5604 _(—) k, respectively.The Data (S1) to Data (Sk) are input to pixels in a selected row infirst to k-th columns through the thin film transistors 5603_1 to 5603_(—) k, respectively. Thus, in the periods T1 to TN, video signal data(DATA) is sequentially written to the pixels in the selected row by kcolumns.

By writing video signal data (DATA) to pixels by a plurality of columnsas described above, the number of video signal data (DATA) or the numberof wirings can be reduced. Accordingly, the number of connections to anexternal circuit can be reduced. By writing video signals to pixels by aplurality of columns, writing time can be extended and insufficientwriting of video signals can be prevented.

Note that as the shift register 5601, the shift register of oneembodiment of the present invention can be used, and as the shiftregister 5601 and the switching circuit 5602, a circuit including thethin film transistors described in any of Embodiments 3 to 5 can beused. In that case, the shift register 5601 can be constituted by onlyn-channel transistors or only p-channel transistors.

Further, an example of a shift register used for part of the scan linedriver circuit and part of the signal line driver circuit, or a shiftregister used for part of the scan line driver circuit or part of thesignal line driver circuit will be described.

The scan line driver circuit includes a shift register. The scan linedriver circuit may also include a level shifter, a buffer, or the likein some cases. In the scan line driver circuit, a clock signal (CLK) anda start pulse signal (SP) are input to the shift register, and then aselection signal is generated. The generated selection signal isbuffered and amplified in the buffer, and the resulting signal issupplied to a corresponding scan line. Gates of transistors in pixels ofone line are electrically connected to a scan line. Since thetransistors in the pixels of one line must be turned on all at once, abuffer which can supply a large amount of current is used.

Further, one embodiment of a shift register is used for part of the scanline driver circuit and part of the signal line driver circuit, or ashift register used for part of the scan line driver circuit or part ofthe signal line driver circuit will be described with reference to FIGS.13A to 13C and FIGS. 14A and 14B.

The shift register includes first to N-th flip-flops 10_1 to 10_N (N isa natural number greater than or equal to 3) (see FIG. 13A). In theshift register in FIG. 13A, to the first to N-th flip-flops 10_1 to 10_Na clock signal CK61, a clock signal CK62, a clock signal CK63, a clocksignal CK64, a clock signal CK65, a clock signal CK66, a clock signalCK67, and a clock signal CK68 are supplied from a wiring 11, a wiring12, a wiring 13, a wiring 14, a wiring 15, a wiring 16, a wiring 17, anda wiring 18, respectively. A start pulse SP1 (a first start pulse) froma wiring 91 is input to the first flip-flop 10_1. Further, to the n-thflip-flop 10 _(—) n (n is a natural number of greater than or equal to 2and less than or equal to N) of the second or one of its subsequentstages, a signal from the flip-flop of the preceding stage (apreceding-stage signal OUT(n−1)) is input. Further, a signal from thethird flip-flop 10_3 in the two stages after the first flip-flop 10_1 isinput to the first flip-flop 10_1, and a signal from the (n+2)-thflip-flop 10_(n+2) in the two stages after the n-th flip-flop 10 _(—) n(such a signal is referred to as a latter-stage signal OUT(n+2)) isinput to the n-th flip-flop 10 _(—) n in the second or one of itssubsequent stages. Therefore, the flip-flops of the respective stagesoutput first output signals OUT(1)(SR) to OUT(N)(SR) to be input to theflip-flop in the subsequent stage and in two stages prior stages andsecond output signals OUT(1) to OUT(N) to be input to another circuit orthe like. Since the latter-stage signal OUT(n+2) is not input to thelast two stages of the shift register, a structure in which a secondstart pulse SP2 and a third start pulse SP3 are input from a wiring 19and a wiring 20, respectively, may be employed, for example, asillustrated in FIG. 13A. Alternatively, another signal generated in theshift register may be used. For example, an (n+1)-th flip-flop 10_(n+1)and an (n+2)-th flip-flop 10_(n+2) (such flip-flops are referred to asdummy stages) both of which do not contribute to pulse output to a pixelportion may be provided and the dummy stages may generate signalscorresponding to the second start pulse (SP2) and the third start pulse(SP3).

Note that the clock signal CK61, the clock signal CK62, the clock signalCK63, the clock signal CK64, the cock signal CK65, the clock signalCK66, the clock signal CK67, and the clock signal CK68 are clock signalswhose duty ratio is 25% and are eight-phase clock signals which aresequentially delayed by ¼ cycle. As compared to the four-phase clocksignals in Embodiment 1, the clock signal CK61, the clock signal CK63,the clock signal CK65, and the clock signal CK67 correspond to the clocksignal CK1, the clock signal CK2, the clock signal CK3, and the clocksignal CK4 in Embodiment 1, respectively. Thus, part of a period inwhich a signal is at high level overlaps with part of a period in whichat least another signal is at high level, whereby the shift register canoperate at higher speed. In this case, the structure can be used inwhich at least the clock signal CK61 is input to the first flip-flop10_1, at least the clock signal CK62 is input to the second flip-flop10_2, at least the clock signal CK63 is input to the third flip-flop10_3, at least the clock signal CK64 is input to the fourth flip-flop10_4, at least the clock signal CK65 is input to the fifth flip-flop10_5, at least the clock signal CK66 is input to the sixth flip-flop10_6, at least the clock signal CK67 is input to the seventh flip-flop107, and at least the clock signal CK68 is input to the eighth flip-flop10_8. In this embodiment, control of operation of the flip-flops or thelike is performed using the clock signals CK61 to CK68. Note that theclock signal is also referred to as GCK or SCK in some cases dependingon a driver circuit to which the clock signal is input; the clock signalis referred to as CK in the following description.

In addition, each of the first to N-th flip-flops 10_1 to 10_N includesa first input terminal 21, a second input terminal 22, a third inputterminal 23, a fourth input terminal 24, a fifth input terminal 25, afirst output terminal 26, and a second output terminal 27 (see FIG.13B). The first input terminal 21, the second input terminal 22, and thethird input terminal 23 are electrically connected to any of the wirings11 to 18. For example, in FIG. 13A, the first input terminal 21 of thefirst flip-flop 10_1 is electrically connected to the wiring 11, thesecond input terminal 22 of the first flip-flop 10_1 is electricallyconnected to the wiring 12, and the third input terminal 23 of the firstflip-flop 10_1 is electrically connected to the wiring 13. The firstinput terminal 21 of the second flip-flop 10_2 is electrically connectedto the wiring 12, the second input terminal 22 of the second flip-flop10_2 is electrically connected to the wiring 13, and the third inputterminal 23 of the second flip-flop 10_2 is electrically connected tothe wiring 14. The first input terminal 21 of the third flip-flop 10_3is electrically connected to the wiring 13, the second input terminal 22of the third flip-flop 10_3 is electrically connected to the wiring 14,and the third input terminal 23 of the third flip-flop 10_3 iselectrically connected to the wiring 15. The first input terminal 21 ofthe fourth flip-flop 10_4 is electrically connected to the wiring 14,the second input terminal 22 of the fourth flip-flop 10_4 iselectrically connected to the wiring 15, and the third input terminal 23of the fourth flip-flop 10_4 is electrically connected to the wiring 16.The first input terminal 21 of the fifth flip-flop 10_5 is electricallyconnected to the wiring 15, the second input terminal 22 of the fifthflip-flop 10_5 is electrically connected to the wiring 16, and the thirdinput terminal 23 of the fifth flip-flop 10_5 is electrically connectedto the wiring 17. The first input terminal 21 of the sixth flip-flop10_6 is electrically connected to the wiring 16, the second inputterminal 22 of the sixth flip-flop 10_6 is electrically connected to thewiring 17, and the third input terminal 23 of the sixth flip-flop 10_6is electrically connected to the wiring 18. The first input terminal 21of the seventh flip-flop 10_7 is electrically connected to the wiring17, the second input terminal 22 of the seventh flip-flop 10_7 iselectrically connected to the wiring 18, and the third input terminal 23of the seventh flip-flop 10_7 is electrically connected to the wiring11. The first input terminal 21 of the eighth flip-flop 10_8 iselectrically connected to the wiring 18, the second input terminal 22 ofthe eighth flip-flop 10_8 is electrically connected to the wiring 11,and the third input terminal 23 of the eighth flip-flop 10_8 iselectrically connected to the wiring 12.

In the first flip-flop 10_1, the clock signal CK61 is input to the firstinput terminal 21; the clock signal CK62 is input to the second inputterminal 22; the clock signal CK63 is input to the third input terminal23; the start pulse is input to the fourth input terminal 24; the outputsignal OUT(3) is input to the fifth input terminal 25; the output signalOUT(1)(SR) is output from the first output terminal 26; and the outputsignal OUT(1) is output from the second output terminal 27.

Next, an example of a specific circuit structure of the flip-flop willbe described with reference to FIG. 13C and FIG. 14A.

The flip-flop in FIG. 13C and FIG. 14A includes first to eleventhtransistors 31 to 41. Signals or power supply voltages are supplied tothe first to eleventh transistors 31 to 41 from a power supply line 51to which a high power supply voltage VDD is supplied, a power supplyline 52 to which a high power supply voltage VCC is supplied, and apower supply line 53 to which a low power supply voltage VSS issupplied, in addition to the above-described first to fifth inputterminals 21 to 25. Further, the flip-flop in FIG. 13C and FIG. 14Aoutputs signals through the first output terminal 26 and the secondoutput terminal 27. Here, the high power supply voltage VDD is higherthan or equal to the high power supply voltage VCC and the high powersupply voltage VCC is higher than the low power supply voltage VSS. Notethat the clock signals CK61 to CK68 each alternate between high leveland low level; the voltage of the high-level clock signal is the highpower supply voltage VDD and the voltage of the low-level clock signalis the low power supply voltage VSS. The high power supply voltage VDDapplied to the power supply line 51 is set to be higher than the highpower supply voltage VCC applied to the power supply line 52, whereby avoltage applied to a gate of a transistor can be lowered, shift in thethreshold voltage of the transistor can be reduced, and deterioration ofthe transistor can be suppressed, without an adverse effect on theoperation of the transistor.

In FIG. 13C and FIG. 14A, one of a source and a drain of the firsttransistor 31 is electrically connected to the power supply line 51, theother of the source and the drain of the first transistor 31 iselectrically connected to one of a source and a drain of the ninthtransistor 39, and a gate of the first transistor 31 is electricallyconnected to the fourth input terminal 24. One of a source and a drainof the second transistor 32 is electrically connected to the powersupply line 53, the other of the source and the drain of the secondtransistor 32 is electrically connected to the one of the source and thedrain of the ninth transistor 39, and a gate of the second transistor 32is electrically connected to a gate of the fourth transistor 34. One ofa source and a drain of the third transistor 33 is electricallyconnected to the first input terminal 21, the other of the source andthe drain of the third transistor 33 is electrically connected to thefirst output terminal 26. One of a source and a drain of the fourthtransistor 34 is electrically connected to the power supply line 53 andthe other of the source and the drain of the fourth transistor 34 iselectrically connected to the first output terminal 26. One of a sourceand a drain of the fifth transistor 35 is electrically connected to thepower supply line 53, the other of the source and the drain of the fifthtransistor 35 is electrically connected to the gate of the secondtransistor 32 and the gate of the fourth transistor 34, and a gate ofthe fifth transistor 35 is electrically connected to the fourth inputterminal 24. One of a source and a drain of the sixth transistor 36 iselectrically connected to the power supply line 52, the other of thesource and the drain of the sixth transistor 36 is electricallyconnected to the gate of the second transistor 32 and the gate of thefourth transistor 34, and a gate of the sixth transistor 36 iselectrically connected to the fifth input terminal 25. One of a sourceand a drain of the seventh transistor 37 is electrically connected tothe power supply line 52, the other of the source and the drain of theseventh transistor 37 is electrically connected to one of a source and adrain of the eighth transistor 38, and a gate of the seventh transistor37 is electrically connected to the third input terminal 23. The otherof the source and the drain of the eighth transistor 38 is electricallyconnected to the gate of the second transistor 32 and the gate of thefourth transistor 34, and a gate of the eighth transistor 38 iselectrically connected to the second input terminal 22. The one of thesource and the drain of the ninth transistor 39 is electricallyconnected to the other of the source and the drain of the firsttransistor 31 and the other of the source and the drain of the secondtransistor 32, the other of the source and the drain of the ninthtransistor 39 is electrically connected to a gate of the thirdtransistor 33 and a gate of the tenth transistor 40, and a gate of theninth transistor 39 is electrically connected to the power supply line52. One of a source and a drain of the tenth transistor 40 iselectrically connected to the first input terminal 21, the other of thesource and the drain of the tenth transistor 40 is electricallyconnected to the second output terminal 27, and the gate of the tenthtransistor 40 is electrically connected to the other of the source andthe drain of the ninth transistor 39. One of a source and a drain of theeleventh transistor 41 is electrically connected to the power supplyline 53, the other of the source and the drain of the eleventhtransistor 41 is electrically connected to the second output terminal27, and a gate of the eleventh transistor 41 is electrically connectedto the gate of the second transistor 32 and the gate of the fourthtransistor 34.

In FIG. 13C, a portion where the gate of the third transistor 33, thegate of the tenth transistor 40, and the other of the source and thedrain of the ninth transistor 39 are connected to one another isreferred to as a node A. In addition, a portion where the gate of thesecond transistor 32, the gate of the fourth transistor 34, the other ofthe source and the drain of the fifth transistor 35, the other of thesource and the drain of the sixth transistor 36, the other of the sourceand the drain of the eighth transistor 38, and the gate of the eleventhtransistor 41 are connected to one another is referred to as a node B.

Here, FIG. 14B illustrates a timing chart of the shift registerincluding the plurality of flip-flops illustrated in FIG. 14A.

As illustrated in FIG. 14B, in a period when a clock signal inputthrough the input terminal 21 is at high level, an output signal from aflip-flop to which the clock signal is input is at high level. Further,timings at which output signals of the flip-flops are at high level aredelayed for ¼ cycle sequentially.

Note that as illustrated in FIG. 14A, by providing the ninth transistor39 whose gate is supplied with the high power supply voltage VCC,advantages described below are obtained before and after bootstrapoperation.

Without the ninth transistor 39 whose gate is supplied with the highpower supply voltage VCC, if the voltage of the node A is raised bybootstrap operation, the voltage of the other of the source and thedrain of the first transistor 31 rises to a value higher than the highpower supply voltage VDD. Then, the source of the first transistor 31switched to the power supply line 51 side. Therefore, in the firsttransistor 31, a high bias voltage is applied between the gate and thesource and between the gate and the drain. Thus, significant stress andincrease in power consumption are caused, which might causedeterioration in the transistor. On the other hand, with the ninthtransistor 39 whose gate is supplied with the high power supply voltageVCC, increase in the voltage of the other of the source and the drain ofthe first transistor 31 can be prevented while the voltage of the node Ais increased by bootstrap operation. In other words, by providing theninth transistor 39, a negative bias voltage applied between the gateand the source of the first transistor 31 can be reduced. Accordingly,with a circuit structure in this embodiment, a negative bias voltageapplied between the gate and the source of the first transistor 31 canbe reduced, so that deterioration of the first transistor 31, which isdue to stress, can be suppressed.

Note that the ninth transistor 39 can be provided anywhere as long asthe drain and the source of the ninth transistor 39 are connected to theother of the source and the drain of the first transistor 31 and thegate of the third transistor 33. Note that when the shift registerincluding the plurality of flip-flops in this embodiment is included ina signal line driver circuit having a larger number of stages than ascan line driver circuit, the ninth transistor 39 can be eliminated,which is advantageous in that the number of transistors is reduced.

When an oxide semiconductor is used for semiconductor layers of thefirst to eleventh transistors 31 to 41, off-current of the thin filmtransistors can be reduced, on-current and field-effect mobility can beincreased, and the degree of deterioration can be reduced; thus,malfunction in a circuit can be reduced. Moreover, when a high voltageis applied to a gate, the degree of deterioration of the transistorincluding an oxide semiconductor is smaller than that of a transistorincluding amorphous silicon. Consequently, similar operation can beobtained even when the high power supply voltage VDD is supplied to, forexample, the power supply line to which the high power supply potentialVCC is supplied, and the number of power supply lines placed betweencircuits can be reduced; thus, the size of the circuit can be reduced.

Note that a similar effect is obtained even when the connection relationis changed so that the clock signal CK62 is supplied from the secondinput terminal 22 to the gate of the seventh transistor 37 and the clocksignal CK63 is supplied from the third input terminal 23 to the gate ofthe eighth transistor 38. In the shift register illustrated in FIG. 14A,states of the seventh transistor 37 and the eighth transistor 38 arechanged so that both the seventh transistor 37 and the eighth transistor38 are on, then the seventh transistor 37 is off and the eighthtransistor 38 is on, and then the seventh transistor 37 and the eighthtransistor 38 are off; thus, the fall in voltage of the node B due tofall in voltages of the second input terminal 22 and the third inputterminal 23 is caused twice by fall in voltage of the gate of theseventh transistor 37 and fall in voltage of the gate of the eighthtransistor 38. On the other hand, in the shift register illustrated inFIG. 14A, states of the seventh transistor 37 and the eighth transistor38 are changed so that both the seventh transistor 37 and the eighthtransistor 38 are on, then the seventh transistor 37 is on and theeighth transistor 38 is off, and then the seventh transistor 37 and theeighth transistor 38 are off; thus, the fall in the voltage of the nodeB due to the fall in the voltages of the second input terminal 22 andthe third input terminal 23 is caused once by the fall in the voltage ofthe gate of the eighth transistor 38. Consequently, it is preferable touse the clock signal supplied to the gate of the seventh transistor 37from the third input terminal 23 and the clock signal supplied to thegate of the eighth transistor 38 from the second input terminal 22 inorder to reduce fluctuation in voltage of the node B, because noise canbe reduced.

In such a manner, a high-level voltage is regularly supplied to the nodeB in a period during which the voltages of the first output terminal 26and the second output terminal 27 are held at low level; thus,malfunction of the flip-flop can be suppressed.

Embodiment 7

In this embodiment, a liquid crystal display device will be described asan example of the display device described in Embodiment 6.

An example of a circuit structure of a pixel in the display device inthis embodiment will be described with reference to FIG. 15. FIG. 15 isa circuit diagram illustrating a circuit structure of a pixel in thedisplay device in this embodiment.

As illustrated in FIG. 15, the pixel includes a transistor 821, a liquidcrystal element 822, and a capacitor 823.

The transistor 821 functions as a selection switch. A gate of thetransistor 821 is electrically connected to a scan line 804, and one ofa source and a drain thereof is electrically connected to a signal line805.

The liquid crystal element 822 has a first terminal and a secondterminal. The first terminal is electrically connected to the other ofthe source and the drain of the transistor 821. A ground potential or avoltage with a given value is applied to the second terminal. The liquidcrystal element 822 includes a first electrode serving as part or all ofthe first terminal, a second electrode serving as part or all of thesecond terminal, and a layer including liquid crystal molecules whosetransmittance is changed by applying voltage between the first electrodeand the second electrode (such a layer is referred to as a liquidcrystal layer).

The capacitor 823 has a first terminal and a second terminal. The firstterminal is electrically connected to the other of the source and thedrain of the transistor 821. The ground potential or a voltage with agiven value is applied to the second terminal. The capacitor 823includes a first electrode serving as part or all of the first terminal,a second electrode serving as part or all of the second terminal, and adielectric layer. The capacitor 823 has a function as a storagecapacitor of the pixel. Note that although the capacitor 823 is notnecessarily provided, the provision of the capacitor 823 can reduceadverse effects due to leakage current of the transistor 821.

For the display device in this embodiment, a twisted nematic (TN) mode,an in-plane-switching (IPS) mode, a fringe field switching (FFS) mode, amulti-domain vertical alignment (MVA) mode, a patterned verticalalignment (PVA) mode, an axially symmetric aligned micro-cell (ASM)mode, an optically compensated birefringence (OCB) mode, a ferroelectricliquid crystal (FLC) mode, an antiferroelectric liquid crystal (AFLC)mode, and the like can be used.

Alternatively, liquid crystal exhibiting a blue phase for which analignment film is not necessary may be used. A blue phase is a kind ofliquid crystal phase and appears just before phase transition from acholesteric phase to an isotropic phase when temperature of cholestericliquid crystal rises. Since the blue phase appears only within a narrowtemperature range, a liquid crystal composition containing a chiralagent at 5 wt. % or more in order to improve the temperature range isused for the liquid crystal layer. The liquid crystal composition whichcontains liquid crystal exhibiting a blue phase and a chiral agent has asmall response time of 10 μs to 100 μs, has optical isotropy, and has asmall viewing angle dependence.

Next, operation of the pixel illustrated in FIG. 15 is described.

First, a pixel to which data is written is selected, and the transistor821 in the selected pixel is turned on by a signal input from the scanline 804.

At this time, a data signal from the signal line 805 is input throughthe transistor 821, so that the first terminal of the liquid crystalelement 822 has the same voltage as the data signal, and thetransmittance of the liquid crystal element 822 is set in accordancewith voltage applied between the first terminal and the second terminal.After data writing, the transistor 821 is turned off by a signal inputfrom the scan line 804, the transmittance of the liquid crystal element822 is maintained during a display period, and the pixel enters into adisplay state. The above operation is sequentially performed per scanline 804, and the above operation is performed in all the pixels. Theabove is the operation of the pixel.

In displaying moving images in a liquid crystal display device, there isa problem in that an afterimage or motion blur occurs because of slowresponse of liquid crystal molecules themselves. In order to improvemoving image characteristics of the liquid crystal display device, thereis a driving technique called black insertion, in which the entirescreen is displayed as black every other frame.

Moreover, a driving technique called double-frame rate driving may beemployed in which the vertical synchronizing frequency is 1.5 times ormore, preferably twice or more as high as a conventional verticalsynchronizing frequency, whereby the response speed is improved.

Further, in order to improve the moving image characteristics of theliquid crystal display device, there is a driving technique in which aplurality of LED (light-emitting diode) light sources, a plurality of ELlight sources, or the like are used as backlights to form an area lightsource, and the light sources forming the area light source areindependently lit intermittently in one frame period. For the area lightsource, LEDs of three kinds or more or an LED which emits white lightmay be used. Since a plurality of LEDs can be independently controlled,the timing when the LED emits light can be synchronized with the timingwhen optical modulation of the liquid crystal layer is changed. Part ofthe LEDs can be turned off in this driving technique, so that powerconsumption can be reduced particularly in the case of displaying animage in which a black display region occupies a large area in onescreen.

By combining these driving techniques, display characteristics such asmoving image characteristics of the liquid crystal display device can beimproved as compared to those of a conventional liquid crystal displaydevice.

Next, a structure of the display device in this embodiment, whichincludes the above pixel, is described with reference to FIGS. 16A and16B. FIGS. 16A and 16B illustrate a structure of the pixel in thedisplay device in this embodiment. FIG. 16A is a top view of the pixel,and FIG. 16B is a cross-sectional view. Note that dotted lines A1-A2 andB1-B2 in FIG. 16A correspond to cross sections A1-A2 and B1-B2 in FIG.16B, respectively.

As illustrated in FIGS. 16A and 16B, the display device in thisembodiment includes, in the cross section A1-A2, a gate electrode 2001over a substrate 2000, an insulating film 2002 provided over the gateelectrode 2001, an oxide semiconductor layer 2003 provided over theinsulating film 2002, a pair of electrodes 2005 a and 2005 b providedover the oxide semiconductor layer 2003, an oxide insulating layer 2007provided over the electrodes 2005 a and 2005 b and the oxidesemiconductor layer 2003, and an electrode 2020 which is in contact withthe electrode 2005 b through an opening portion provided in the oxideinsulating layer 2007.

Moreover, the display device includes, in the cross section B1-B2, anelectrode 2008 over the substrate 2000, the insulating film 2002 overthe electrode 2008, the oxide insulating layer 2007 provided over theinsulating film 2002, and the electrode 2020 provided over the oxideinsulating layer 2007.

Electrodes 2022 and 2029 and electrodes 2023, 2024, and 2028 serve as anelectrode or a wiring for connection with an FPC.

The transistors described in Embodiments 3 to 5 can be used for thetransistors in this embodiment, for example; therefore, detaileddescription is omitted here.

The electrodes 2020, 2029, and 2028 are formed using indium oxide(In₂O₃), an alloy of indium oxide and tin oxide (In₂O₃—SnO₂, referred toas ITO), or the like by a sputtering method, a vacuum evaporationmethod, or the like. Such a material is etched with a hydrochloricacid-based solution. However, since a residue is easily generatedparticularly in etching ITO, an alloy of indium oxide and zinc oxide(In₂O₃—ZnO) may be used to improve etching processability.

Further, FIGS. 17A1 and 17A2 are a cross-sectional view and a top viewof a gate wiring terminal portion at this stage. FIG. 17A1 is thecross-sectional view taken along line C1-C2 of FIG. 17A2. In FIG. 17A1,a transparent conductive film 2055 formed over a protective insulatingfilm 2054 is a terminal electrode for connection, which functions as aninput terminal. Further, in FIG. 17A1, in the terminal portion, a firstterminal 2051 which is formed of the same material as a gate wiring anda connection electrode 2053 which is formed of the same material as asource wiring overlap with each other with a gate insulating layer 2052therebetween, and the first terminal 2051 and the transparent conductivefilm 2055 are in direct contact with each other in a contact holeprovided in the gate insulating layer 2052 to form conduction. Moreover,the connection electrode 2053 and the transparent conductive film 2055are in direct contact with each other in a contact hole provided in theprotective insulating film 2054 to form conduction.

FIGS. 17B1 and 17B2 are a cross-sectional view and a top view of asource wiring terminal portion. FIG. 17B1 is the cross-sectional viewtaken along line C3-C4 of FIG. 17B2. In FIG. 17B1, the transparentconductive film 2055 formed over the protective insulating film 2054 isa terminal electrode for connection, which functions as an inputterminal. Moreover, in FIG. 17B1, in the terminal portion, an electrode2056 which is formed of the same material as the gate wiring is placedbelow a second terminal 2050 which is electrically connected to thesource wiring, so as to overlap with the second terminal 2050 with thegate insulating layer 2052 therebetween. The electrode 2056 is notelectrically connected to the second terminal 2050. When the electrode2056 is set to have voltage different from that of the second terminal2050, for example, a floating voltage, GND, or 0 V, capacitance forpreventing noise or static electricity can be formed. Further, thesecond terminal 2050 is electrically connected to the transparentconductive film 2055 through the protective insulating film 2054.

A plurality of gate wirings, source wirings, and capacitor wirings areprovided depending on the pixel density. In the terminal portion, aplurality of first terminals at the same voltage as the gate wiring, aplurality of second terminals at the same voltage as the source wiring,a plurality of third terminals at the same voltage as the capacitorwiring, and the like are arranged. The number of each of the terminalsmay be any number and may be determined by a practitioner asappropriate.

Accordingly, a pixel TFT portion including a bottom-gate n-channel TFTand a storage capacitor can be completed. By disposing the TFT and thestorage capacitor in each pixel of a pixel portion in which pixels arearranged in matrix, one of substrates for manufacturing an active matrixdisplay device can be obtained. In this specification, such a substrateis referred to as an active matrix substrate for convenience.

In the case of manufacturing an active matrix liquid crystal displaydevice, an active matrix substrate and a counter substrate provided witha counter electrode are bonded to each other with a liquid crystal layerinterposed therebetween. Note that a common electrode electricallyconnected to the counter electrode on the counter substrate is providedover the active matrix substrate, and a fourth terminal electricallyconnected to the common electrode is provided in the terminal portion.The fourth terminal is provided so that the common electrode is set to afixed potential such as GND or 0 V.

The n-channel transistor obtained in this embodiment uses anIn—Ga—Zn—O-based non-single-crystal film for its channel formationregion and has favorable dynamic characteristics. Accordingly, thesedriving techniques can be applied in combination.

Further, when a light-emitting display device is manufactured, in orderto set one electrode (also referred to as a cathode) of an organiclight-emitting element to have a low power supply voltage VSS, forexample, GND or 0 V, a fourth terminal for making the cathode have thelow power supply voltage VSS such as GND or 0 V is provided in aterminal portion. Also in manufacturing a light-emitting display device,a power supply line is provided in addition to a source wiring and agate wiring. Accordingly, the terminal portion is provided with a fifthterminal electrically connected to the power supply line.

A gate line driver circuit or a source line driver circuit is formedusing TFTs including an oxide semiconductor, whereby manufacturing costis reduced. Moreover, a gate electrode of the TFT included in the drivercircuit is directly connected to a source wiring or a drain wiring sothat the number of contact holes is reduced, whereby a display devicecan be provided in which the area occupied by the driver circuit isreduced.

Therefore, according to this embodiment, a display device having highelectrical properties and high reliability can be provided at low cost.

Note that this embodiment can be combined with or replaced by any of theother embodiments as appropriate.

Embodiment 8

In this embodiment, a light-emitting display device will be described asan example of the display device described in Embodiment 6. In thisembodiment, a light-emitting display device in which electroluminescenceis used for a light-emitting element will be described as an example.

Light-emitting elements utilizing electroluminescence are classifiedaccording to whether a light-emitting material is an organic compound oran inorganic compound. In general, the former is referred to as anorganic EL element, and the latter as an inorganic EL element.

In an organic EL element, by application of voltage to thelight-emitting element, electrons and holes are separately injected froma pair of electrodes into a layer containing a light-emitting organiccompound, and current flows. Then, the carriers (electrons and holes)are recombined, thereby emitting light. Based on such a mechanism, sucha light-emitting element is referred to as a current-excitationlight-emitting element.

Inorganic EL elements are classified, according to the elementstructures, into a dispersion inorganic EL elements and thin-filminorganic EL elements. A dispersion inorganic EL element includes alight-emitting layer where particles of a light-emitting material aredispersed in a binder, and its light emission mechanism isdonor-acceptor recombination light emission utilizing a donor level andan acceptor level. A thin-film inorganic EL element has a structure inwhich a light-emitting layer is sandwiched between dielectric layers,which are further sandwiched between electrodes, and its light emissionmechanism is localized light emission utilizing inner-shell electrontransition of metal ions. Note that, an organic EL element is describedas a light-emitting element here.

A circuit structure of a pixel in a display device in this embodimentwill be described with reference to FIG. 18. FIG. 18 is a circuitdiagram illustrating a circuit structure of a pixel in the displaydevice in this embodiment.

As illustrated in FIG. 18, the pixel of the display device in thisembodiment includes a transistor 851, a capacitor 852 serving as astorage capacitor in the pixel, a transistor 853, and a light-emittingelement 854.

A gate of the transistor 851 is electrically connected to a scan line855, and one of a source and a drain thereof is electrically connectedto a signal line 856. A high power supply voltage VDD is applied to theother of the source and the drain of the transistor 851 through thecapacitor 852.

A gate of the transistor 853 is electrically connected to the other ofthe source and the drain of the transistor 851. The high power supplyvoltage VDD is applied to one of a source and a drain of the transistor853.

The light-emitting element 854 has a first terminal and a secondterminal. The first terminal is electrically connected to the other ofthe source and the drain of the transistor 853. A low power supplyvoltage VSS is applied to the second terminal.

Next, operation of the pixel illustrated in FIG. 18 will be described.

First, a pixel to which data is written is selected. In the selectedpixel, the transistor 851 is turned on by a scan signal input from thescan line 855, and a video signal (also referred to as a data signal),which is a fixed voltage, is input from the signal line 856 to the gateof the transistor 853.

The transistor 853 is turned on or off by a voltage in response to thedata signal input to the gate. When the transistor 853 is on, voltage ofthe light-emitting element 854 depends on a gate voltage of thetransistor 853 and a first voltage. At this time, current flows throughthe light-emitting element 854 depending on the voltage applied betweenthe first terminal and the second terminal, and the light-emittingelement 854 emits light with luminance in response to the amount ofcurrent flowing therethrough. Further, since the gate voltage of thetransistor 853 is held for a certain period by the capacitor 852, thelight-emitting element 854 maintains a light-emitting state for acertain period.

When the data signal input from the signal line 856 to the pixel isdigital, the pixel enters into a light-emitting state or anon-light-emitting state by switching on and off of the transistor 851.Thus, gray levels can be expressed by an area ratio grayscale method ora time ratio grayscale method. An area ratio grayscale method refers toa driving method by which one pixel is divided into a plurality ofsubpixels and the subpixels each having the structure illustrated inFIG. 18 are independently driven based on data signals so that grayscaleis displayed. Further, a time ratio grayscale method refers to a drivingmethod by which a period during which a pixel emits light is controlledso that grayscale is displayed.

Since the response time of a light-emitting element is higher than thatof a liquid crystal element or the like, the light-emitting element issuitable for a time ratio grayscale method as compared to the liquidcrystal element. Specifically, when display is performed by a time ratiograyscale method, one frame period is divided into a plurality ofsubframe periods. Then, in accordance with video signals, thelight-emitting element in the pixel is set in a light-emitting state orin a non-light-emitting state during each subframe period. By dividingone frame period into a plurality of subframe periods, the total lengthof time, in which a pixel actually emits light in one frame period, canbe controlled by video signals, and grayscale can be displayed.

Among driver circuits in the light-emitting display device, part of adriver circuit which can be formed using n-channel TFTs can be formedover a substrate where TFTs in a pixel portion are formed. Moreover, asignal line driver circuit and a scan line driver circuit can be formedusing only n-channel TFTs.

Next, structures of the light-emitting element will be described withreference to FIGS. 19A to 19C. Here, a cross-sectional structure of apixel in the case of an n-channel driving TFT is described as anexample. TFTs 7001, 7011, and 7021, which are driving TFTs used in adisplay device in FIGS. 19A, 19B, and 19C respectively, can be formed ina manner similar to the TFTs described in the above embodiments, includean oxide semiconductor layer as a semiconductor layer, and have highreliability.

In order to extract light emitted from the light-emitting element, atleast one of an anode and a cathode needs to be transparent. A TFT and alight-emitting element are formed over a substrate. There arelight-emitting elements having a top emission structure in which lightis extracted through a surface opposite to the substrate, having abottom emission structure in which light is extracted through a surfaceon the substrate side, and having a dual emission structure in whichlight is extracted through a surface on the substrate side and a surfaceopposite to the substrate. The pixel structure of the present inventioncan be applied to the light-emitting element having any of theseemission structures.

A light-emitting element having a top emission structure will bedescribed with reference to FIG. 19A.

FIG. 19A is a cross-sectional view of a pixel in the case where adriving TFT 7001 is an n-channel TFT and light is emitted from alight-emitting element 7002 to an anode 7005 side. In FIG. 19A, acathode 7003 of the light-emitting element 7002 is electricallyconnected to the driving TFT 7001, and a light-emitting layer 7004 andthe anode 7005 are stacked in this order over the cathode 7003. Thecathode 7003 can be formed using a variety of conductive materials aslong as they have a low work function and reflect light. For example,Ca, Al, MgAg, AlLi, or the like is preferably used. The light-emittinglayer 7004 may be formed using a single layer or a plurality of layersstacked. When the light-emitting layer 7004 is formed using a pluralityof layers, the light-emitting layer 7004 is formed by stacking anelectron-injection layer, an electron-transport layer, a light-emittinglayer, a hole-transport layer, and a hole-injection layer in this orderover the cathode 7003. It is not necessary to form all of these layers.The anode 7005 is formed using a light-transmitting conductive filmformed from a light-transmitting conductive material such as indiumoxide including tungsten oxide, indium zinc oxide including tungstenoxide, indium oxide including titanium oxide, indium tin oxide includingtitanium oxide, indium tin oxide (hereinafter, referred to as ITO),indium zinc oxide, or indium tin oxide to which silicon oxide is added.

The light-emitting element 7002 corresponds to a region where thelight-emitting layer 7004 is sandwiched between the cathode 7003 and theanode 7005. In the case of the pixel illustrated in FIG. 19A, light isemitted from the light-emitting element 7002 to the anode 7005 side asindicated by an arrow.

Next, a light-emitting element having a bottom emission structure willbe described with reference to FIG. 19B. FIG. 19B is a cross-sectionalview of a pixel in the case where the driving TFT 7011 is an n-channelTFT, and light is emitted from a light-emitting element 7012 to thecathode 7013 side. In FIG. 19B, the cathode 7013 of the light-emittingelement 7012 is formed over a light-transmitting conductive film 7017which is electrically connected to the driving TFT 7011, and alight-emitting layer 7014 and an anode 7015 are stacked in this orderover the cathode 7013. Note that a light-blocking film 7016 forreflecting or blocking light may be formed so as to cover the anode 7015when the anode 7015 has a light-transmitting property. For the cathode7013, a variety of materials can be used as long as they are conductivematerials having a low work function, as in the case of FIG. 19A. Notethat the cathode 7013 is formed to have a thickness which allows lighttransmission (preferably, approximately 5 nm to 30 nm). For example, analuminum film with a thickness of 20 nm can be used for the cathode7013. As in the case of FIG. 19A, the light-emitting layer 7014 may beformed using a single layer or a plurality of layers stacked. The anode7015 is not required to transmit light, but can be formed using alight-transmitting conductive material as in the case of FIG. 19A. Thelight-blocking film 7016 can be formed using, for example, a metal whichreflects light; however, it is not limited to a metal film. For example,a resin to which a black pigment is added can be used.

The light-emitting element 7012 corresponds to a region where thelight-emitting layer 7014 is sandwiched between the cathode 7013 and theanode 7015. In the case of the pixel illustrated in FIG. 19B, light isemitted from the light-emitting element 7012 to the cathode 7013 side asindicated by an arrow.

Next, a light-emitting element having a dual emission structure will bedescribed with reference to FIG. 19C. In FIG. 19C, a cathode 7023 of alight-emitting element 7022 is formed over a light-transmittingconductive film 7027 which is electrically connected to the driving TFT7021, and a light-emitting layer 7024 and an anode 7025 are stacked inthis order over the cathode 7023. As in the case of FIG. 19A, thecathode 7023 can be formed using a variety of conductive materials aslong as they have a low work function. Note that the cathode 7023 isformed to have a thickness which allows light transmission. For example,a film of Al having a thickness of 20 inn can be used for the cathode7023. As in the case of FIG. 19A, the light-emitting layer 7024 may beformed using a single layer or a plurality of layers stacked. The anode7025 can be formed using a light-transmitting conductive material as inthe case of FIG. 19A.

The light-emitting element 7022 corresponds to a region where thecathode 7023, the light-emitting layer 7024, and the anode 7025 overlapwith one another. In the case of the pixel illustrated in FIG. 19C,light is emitted from the light-emitting element 7022 to both the anode7025 side and the cathode 7023 side as indicated by arrows.

Note that although the organic EL elements are described here as thelight-emitting elements, an inorganic EL element can also be provided asa light-emitting element.

Note that in this embodiment, the example is described in which a TFT(also referred to as a driving TFT) which controls driving of alight-emitting element is electrically connected to the light-emittingelement; alternatively, a structure may be employed in which a TFT forcurrent control is connected between the driving TFT and thelight-emitting element.

Next, the appearance and cross section of the display device (alsoreferred to as a light-emitting panel) in this embodiment will bedescribed with reference to FIGS. 20A and 20B. FIG. 20A is a top view ofthe display device in this embodiment, in which a TFT and alight-emitting element forming over a first substrate are sealed betweenthe first substrate and a second substrate by a sealing material. FIG.20B is a cross-sectional view taken along line H-I in FIG. 20A.

A sealant 4505 is provided so as to surround a pixel portion 4502,signal line driver circuits 4503 a and 4503 b, and scan line drivercircuits 4504 a and 4504 b which are provided over a first substrate4501. In addition, a second substrate 4506 is provided over the pixelportion 4502, the signal line driver circuits 4503 a and 4503 b, and thescan line driver circuits 4504 a and 4504 b. Accordingly, the pixelportion 4502, the signal line driver circuits 4503 a and 4503 b, and thescan line driver circuits 4504 a and 4504 b are sealed together with afiller 4507, by the first substrate 4501, the sealant 4505, and thesecond substrate 4506. In such a manner, it is preferable to pack (seal)the pixel portion 4502, the signal line driver circuits 4503 a and 4503b, and the scan line driver circuits 4504 a and 4504 b with a protectivefilm (such as an attachment film or an ultraviolet curable resin film)or a cover material with high air-tightness and little degasification sothat the pixel portion 4502, the signal line driver circuits 4503 a and4503 b, and the scan line driver circuits 4504 a and 4504 b are notexposed to the air.

The pixel portion 4502, the signal line driver circuits 4503 a and 4503b, and the scan line driver circuits 4504 a and 4504 b, which are formedover the first substrate 4501, each include a plurality of TFTs. In FIG.20B, a TFT 4510 included in the pixel portion 4502 and a TFT 4509included in the signal line driver circuit 4503 a are illustrated as anexample.

As the TFTs 4509 and 4510, the highly reliable TFTs described in any ofEmbodiments 3 to 5, which include an oxide semiconductor layer as asemiconductor layer, can be used. In this embodiment, the TFTs 4509 and4510 are n-channel TFTs. An insulating layer 4542 is formed over theTFTs 4509 and 4510 and an insulating layer 4544 is formed over theinsulating layer 4542.

Moreover, reference numeral 4511 denotes a light-emitting element. Afirst electrode 4517 which is a pixel electrode included in thelight-emitting element 4511 is electrically connected to a sourceelectrode or a drain electrode of the TFT 4510. Note that thelight-emitting element 4511 has a stacked structure of the firstelectrode 4517, an electroluminescent layer 4512, and a second electrode4513; however, the structure of the light-emitting element is notlimited to that shown in this embodiment. The structure of thelight-emitting element 4511 can be changed as appropriate depending onthe direction in which light is extracted from the light-emittingelement 4511, or the like.

A bank 4520 is formed using an organic resin film, an inorganicinsulating film, or organic polysiloxane. In particular, it ispreferable that the bank 4520 be formed using a photosensitive materialto have an opening portion over the first electrode 4517, and a sidewallof the opening portion be formed as an inclined surface with acontinuous curvature.

The electroluminescent layer 4512 may be formed with a single layer or aplurality of layers stacked.

In order to prevent oxygen, hydrogen, moisture, carbon dioxide, or thelike from entering the light-emitting element 4511, a protective layermay be formed over the second electrode 4513 and the bank 4520. As theprotective layer, a silicon nitride film, a silicon nitride oxide film,a DLC film, or the like can be formed.

A variety of signals and voltages are supplied to the signal line drivercircuits 4503 a and 4503 b, the scan line driver circuits 4504 a and4504 b, or the pixel portion 4502 from an FPC 4518 a and an FPC 4518 b.

In this embodiment, a connection terminal electrode 4515 is formed usingthe same conductive film as the first electrode 4517 included in thelight-emitting element 4511. A terminal electrode 4516 is formed usingthe same conductive film as the source electrodes and the drainelectrodes of the TFTs 4509 and 4510.

The connection terminal electrode 4515 is electrically connected to aterminal included in the FPC 4518 a via an anisotropic conductive film4519.

The second substrate 4506 located in the direction in which light isextracted from the light-emitting element 4511 needs to have alight-transmitting property. In that case, a light-transmitting materialsuch as a glass plate, a plastic plate, a polyester film, or an acrylicfilm is used for the substrate.

As the filler 4507, an ultraviolet curable resin or a thermosettingresin can be used in addition to an inert gas such as nitrogen or argon.For example, PVC (polyvinyl chloride), acrylic, polyimide, an epoxyresin, a silicone resin, PVB (polyvinyl butyral), or EVA (ethylene vinylacetate) can be used. In this embodiment, nitrogen is used for thefiller.

In addition, if needed, an optical film such as a polarizing plate, acircularly polarizing plate (including an elliptically polarizingplate), a retardation plate (a quarter-wave plate or a half-wave plate),or a color filter may be provided as appropriate on a light-emittingsurface of the light-emitting element. Further, a polarizing plate or acircularly polarizing plate may be provided with an anti-reflectionfilm. For example, anti-glare treatment by which reflected light can bediffused by projections and depressions on the surface so as to reducethe glare can be performed.

The signal line driver circuits 4503 a and 4503 b and the scan linedriver circuits 4504 a and 4504 b may be mounted as driver circuitsformed using a single crystal semiconductor film or a polycrystallinesemiconductor film over a substrate separately prepared. In addition,only the signal line driver circuits or part thereof, or only the scanline driver circuits or part thereof may be separately formed andmounted. This embodiment is not limited to the structure illustrated inFIGS. 20A and 20B.

Through the above steps, a highly reliable light-emitting display device(display panel) can be manufactured.

This embodiment can be combined with or replaced by any of the otherembodiments as appropriate.

Embodiment 9

In this embodiment, electronic paper will be described as an example ofthe display device described in Embodiment 6.

The shift register described in the above embodiments can be used inelectronic paper. Electronic paper is also referred to as anelectrophoretic display device (an electrophoretic display) and hasadvantages in that it has high readability which is equivalent to normalpaper, it has less power consumption than other display devices, and itcan be made thin and lightweight.

Electrophoretic displays can have various modes. An electrophoreticdisplay contains a plurality of microcapsules dispersed in a solvent ora solute, each of which contains first particles that are positivelycharged and second particles that are negatively charged. By applying anelectric field to the microcapsules, the particles in the microcapsulesmove in opposite directions to each other and only the color of theparticles gathering on one side is displayed. Note that the firstparticles and the second particles each contain pigment and do not movewithout an electric field. Moreover, the first particles and the secondparticles have different colors (which may be colorless).

Thus, an electrophoretic display is a display that utilizes a so-calleddielectrophoretic effect by which a substance having a high dielectricconstant moves to a high-electric field region. An electrophoreticdisplay does not need a polarizing plate and a counter substrate, whichare required in a liquid crystal display device, so that the thicknessand weight of the electrophoretic display device can be reduced.

A solution in which the above-described microcapsules are dispersed in asolvent is referred to as electronic ink. This electronic ink can beprinted on a surface of glass, plastic, cloth, paper, or the like.Furthermore, by using a color filter or particles that have a pigment,color display can also be achieved.

In addition, if a plurality of the microcapsules are arranged asappropriate over an active matrix substrate so as to be interposedbetween two electrodes, an active matrix display device can becompleted, and display can be performed by application of an electricfield to the microcapsules. For example, an active matrix substrateformed using the TFT described in any of the above embodiments can beused.

Note that the first particles and the second particles in themicrocapsules may be formed from one of a conductive material, aninsulating material, a semiconductor material, a magnetic material, aliquid crystal material, a ferroelectric material, an electroluminescentmaterial, an electrochromic material, and a magnetophoretic material ora composite material of any of these materials.

Next, an example of a structure of electronic paper in this embodimentwill be described with reference to FIG. 21. FIG. 21 is across-sectional view illustrating a structure of electronic paper inthis embodiment.

The electronic paper illustrated in FIG. 21 includes a TFT 581 over asubstrate 580, insulating layers 583, 584, and 585 which are stackedover the TFT 581, an electrode 587 which is in contact with a sourceelectrode or a drain electrode of the TFT 581 through an opening portionprovided in the insulating layers 583 to 585. In addition, theelectronic paper includes, between the electrode 587 and an electrode588 provided on a substrate 596, spherical particles 589, each of whichincludes a black region 590 a, a white region 590 b, and a cavity 594which surrounds the black region 590 a and the white region 590 b and isfilled with a liquid, and a filler 595 provided around the sphericalparticles 589.

The TFT 581 is a highly reliable TFT including an oxide semiconductorlayer as a semiconductor layer and can be manufactured in a mannersimilar to the TFTs described in any of the above embodiments, forexample.

A method in which the spherical particles 589 are used is called atwisting ball display method. In the twisting ball display method,spherical particles each colored in black and white are arranged betweena first electrode and a second electrode, which are electrodes used fora display element, and potential difference is generated between thefirst electrode and the second electrode to control orientation of thespherical particles; accordingly, display is performed.

Further, instead of an element including the spherical particles, anelectrophoretic element can also be used. A microcapsule having adiameter of approximately 10 μm to 200 μm in which transparent liquid,positively charged white microparticles, and negatively charged blackmicroparticles are encapsulated, is used. In the microcapsule providedbetween the first electrode and the second electrode, when an electricfield is applied by the first electrode and the second electrode, thewhite microparticles and the black microparticles move to oppositedirections to each other, so that white or black can be displayed. Adisplay element using this principle is an electrophoretic displayelement. The electrophoretic display element has higher reflectance thana liquid crystal display element, and thus, an auxiliary light isunnecessary, power consumption is low, and a display portion can berecognized in a dim place. In addition, even when power is not suppliedto the display portion, an image which has been displayed once can bemaintained. Accordingly, a displayed image can be stored even if asemiconductor device having a display function (which may be referred tosimply as a display device or a semiconductor device provided with adisplay device) is distanced from an electric wave source.

The shift register in Embodiment 1 can be used in a driver circuit ofthe electronic paper of this embodiment, for example. Further, since atransistor using an oxide semiconductor layer can be applied to atransistor in the display portion, the driver circuit and the displayportion can be provided over one substrate, for example.

The electronic paper can be used in electronic appliances of variousfields, which display information. For example, the electronic paper canbe applied to e-book readers (electronic books), posters, advertisementson vehicles such as trains, or displays on a variety of cards such ascredit cards. An example of such an electronic device is illustrated inFIG. 22. FIG. 22 illustrates an example of an e-book reader.

As illustrated in FIG. 22, an e-book reader 2700 has two housings 2701and 2703. The housings 2701 and 2703 are bound with each other by anaxis portion 2711, along which the e-book reader 2700 is opened andclosed. With such a structure, the e-book reader 2700 can operate like apaper book.

A display portion 2705 and a display portion 2707 are incorporated inthe housing 2701 and the housing 2703, respectively. The display portion2705 and the display portion 2707 may display one image or differentimages. In the case where the display portion 2705 and the displayportion 2707 display different images, for example, a display portion onthe right side (the display portion 2705 in FIG. 22) can display a textimage and a display portion on the left side (the display portion 2707in FIG. 22) can display a different type of image.

FIG. 22 illustrates an example in which the housing 2701 is providedwith an operation portion and the like. For example, the housing 2701 isprovided with a power switch 2721, an operation key 2723, a speaker2725, and the like. With the operation key 2723, pages can be turned.Note that a keyboard, a pointing device, and the like may be provided onthe same surface as the display portion of the housing. In addition, anexternal connection terminal (an earphone terminal, a USB terminal, aterminal connectable to a variety of cables such as an AC adapter and aUSB cable, or the like), a recording medium insertion portion, and thelike may be provided on the back surface or the side surface of thehousing. Moreover, the e-book reader 2700 may have a function of anelectronic dictionary.

The e-book reader 2700 may have a structure capable of wirelesslytransmitting and receiving data. Through wireless communication, desiredbook data or the like can be purchased and downloaded from an e-bookserver.

Note that this embodiment can be combined with or replaced by any of theother embodiments as appropriate.

Embodiment 10

In this embodiment, a system-on-panel display device will be describedas one embodiment of the display device in Embodiment 6.

The shift register which is one embodiment of the present invention canbe applied to a system-on-panel display device in which a displayportion and a driver circuit are provided over one substrate. A specificstructure of the display device will be described below.

The display device in this embodiment includes a display element. As thedisplay element, a liquid crystal element (also referred to as a liquidcrystal display element) or a light-emitting element (also referred toas a light-emitting display element) can be used. The light-emittingelement includes an element whose luminance is controlled by current orvoltage in its category, and specifically includes an inorganicelectroluminescent (EL) element, an organic EL element, and the like.Furthermore, a display medium whose contrast is changed by an electriceffect, such as electronic ink, can be used.

In addition, the display device in this embodiment includes a panel inwhich a display element is sealed, and a module in which an IC and thelike including a controller are mounted on the panel. Moreover,regarding one embodiment of an element substrate before the displayelement is completed in a process for manufacturing the display device,the element substrate is provided with a unit for supplying current tothe display element in each of a plurality of pixels. Specifically, theelement substrate may be in a state after only a pixel electrode of thedisplay element is formed, a state after a conductive film to serve as apixel electrode is formed and before the conductive film is etched toform the pixel electrode, or any of other states.

Note that a display device in this specification means an image displaydevice, a display device, or a light source (including a lightingdevice). Further, the display device also includes a module providedwith a connector. For example, the display device includes the followingmodules in its category: a module to which a flexible printed circuit(FPC), a tape automated bonding (TAB) tape, or a tape carrier package(TCP) is attached; a module having a TAB tape or a TCP at the end ofwhich is provided with a printed wiring board; and a module having anintegrated circuit (IC) that is directly mounted on a display element bya chip on glass (COG) method.

Next, the appearance and cross section of a liquid crystal display panelwhich is one embodiment of the display device in this embodiment will bedescribed with reference to FIGS. 23A1 to 23B.

Each of FIGS. 23A1 and 23A2 is a top view of the display device in thisembodiment, in which a liquid crystal element 4013 and TFTs 4010 and4011 which are formed over a first substrate 4001 are sealed between thefirst substrate 4001 and a second substrate 4006 with a sealant 4005.The TFTs 4010 and 4011 includes the In—Ga—Zn—O-based film shown inEmbodiment 4 as a semiconductor layer. FIG. 23B is a cross-sectionalview taken along line M-N in FIGS. 23A1 and 23A2.

In the display device in this embodiment, the sealant 4005 is providedso as to surround a pixel portion 4002 and a scan line driver circuit4004 which are provided over the first substrate 4001. The secondsubstrate 4006 is provided over the pixel portion 4002 and the scan linedriver circuit 4004. Thus, the pixel portion 4002 and the scan linedriver circuit 4004 are sealed together with a liquid crystal layer4008, by the first substrate 4001, the sealant 4005, and the secondsubstrate 4006. Further, a signal line driver circuit 4003 which isformed using a single crystal semiconductor film or a polycrystallinesemiconductor film over a substrate prepared separately is mounted in aregion that is different from the region surrounded by the sealant 4005over the first substrate 4001.

Note that there is no particular limitation on the connection method ofa driver circuit which is separately formed, and a COG method, a wirebonding method, a TAB method, or the like can be used. FIG. 23A1illustrates an example of mounting the signal line driver circuit 4003by a COG method, and FIG. 23A2 illustrates an example of mounting thesignal line driver circuit 4003 by a TAB method.

The pixel portion 4002 and the scan line driver circuit 4004, which areprovided over the first substrate 4001, each include a plurality ofTFTs. FIG. 23B illustrates the TFT 4010 included in the pixel portion4002 and the TFT 4011 included in the scan line driver circuit 4004.Insulating layers 4020, 4021, and 4042 are provided over the TFTs 4010and 4011.

As the TFTs 4010 and 4011, a TFT including an oxide semiconductor layeras a semiconductor layer can be used. In this embodiment, the TFTs 4010and 4011 are n-channel TFTs.

A pixel electrode 4030 included in the liquid crystal element 4013 iselectrically connected to the TFT 4010. A counter electrode 4031 of theliquid crystal element 4013 is formed on the second substrate 4006. Theliquid crystal element 4013 corresponds to a region where the pixelelectrode 4030, the counter electrode 4031, and the liquid crystal layer4008 overlap with each other. The pixel electrode 4030 and the counterelectrode 4031 are provided with insulating layers 4032 and 4033functioning as alignment films, respectively. The liquid crystal layer4008 is sandwiched between the pixel electrode 4030 and the counterelectrode 4031 with the insulating layers 4032 and 4033 therebetween.

A material and a manufacturing method which can be used for thesubstrate 201 in the above embodiments can be applied to the firstsubstrate 4001 and the second substrate 4006.

A spacer 4035 is a columnar partition obtained by selective etching ofan insulating film, and is provided in order to control a distance (acell gap) between the pixel electrode 4030 and the counter electrode4031. Note that a spherical spacer may be used. Further, the counterelectrode 4031 is electrically connected to a common potential lineprovided over the same substrate as the TFT 4010. With the use of acommon connection portion, the counter electrode 4031 and the commonpotential line can be electrically connected to each other throughconductive particles arranged between the pair of substrates. Note thatthe conductive particles are included in the sealant 4005.

Note that although this embodiment shows an example of a transmissiveliquid crystal display device, the present invention can also be appliedto a reflective liquid crystal display device or a semi-transmissiveliquid crystal display device.

As the liquid crystal display device in this embodiment, an example isshown in which a polarizing plate is provided on the outer side of thesubstrate (on the viewer side) and a coloring layer and the electrodeused for the display element are sequentially provided on the innerside; alternatively, a polarizing plate may be provided on the innerside of the substrate. The stacked structure of the polarizing plate andthe coloring layer is not limited to this embodiment and may be set asappropriate depending on materials of the polarizing plate and thecoloring layer or conditions of manufacturing process. Further, alight-blocking film serving as a black matrix may be provided.

In this embodiment, in order to reduce surface unevenness of the TFT andimprove reliability of the TFT, the TFT is covered with insulatinglayers (the insulating layers 4020, 4021, and 4042) functioning as aprotective layer or a planarization insulating film. Note that theprotective layer prevents penetration of contaminating impurities suchas an organic substance, metal, or water vapor included in the air, andis preferably a dense film. The protective layer may be formed by asputtering method to be a single layer or a stacked layer of a siliconoxide film, a silicon nitride film, a silicon oxynitride film, a siliconnitride oxide film, an aluminum oxide film, an aluminum nitride film, analuminum oxynitride film, and/or an aluminum nitride oxide film.Although this embodiment shows an example of forming the protectivelayer by a sputtering method, there is no limitation thereto and varietyof methods may be employed. Further, with the use of a non-reduciblefilm, the protective layer can also function as a reduction preventionlayer.

Here, an insulating layer having a stacked structure is formed as theprotective layer. A silicon oxide film is formed as the insulating layer4042 by a sputtering method, which is a first layer of the protectivelayer. The use of the silicon oxide film as the protective layer iseffective in preventing hillocks in an aluminum film used for a sourceelectrode and a drain electrode.

A silicon nitride film is formed as the insulating layer 4020 by asputtering method, which is a second layer of the protective layer. Theuse of the silicon nitride film as the protective layer can preventmobile ions such as sodium from entering the semiconductor region andchanging electric characteristics of the TFT.

Further, the semiconductor layer may be subjected to a heat treatmentafter formation of the protective layer.

The insulating layer 4021 is formed as the planarizing insulating film.An organic material having heat resistance, such as polyimide, acrylic,polyimideamide, benzocyclobutene, polyamide, or epoxy can be used forthe insulating layer 4021. Other than such organic materials, alow-dielectric constant material (a low-k material), a siloxane-basedresin, phosphosilicate glass (PSG), borophosphosilicate glass (BPSG), orthe like can also be used. Note that the insulating layer 4021 may beformed by stacking a plurality of insulating films formed of thesematerials.

Note that the siloxane resin corresponds to a resin including a Si—O—Sibond formed using a siloxane-based material as a starting material. Thesiloxane-based resin may include an organic group (e.g., an alkyl groupor an aryl group) or a fluoro group as a substituent. Moreover, theorganic group may include a fluoro group.

There is no particular limitation on the formation method of theinsulating layer 4021. Depending on the material, the insulating layer4021 can be formed by a method such as a sputtering method, an SOGmethod, a spin coating method, a dipping method, a spray coating method,or a droplet discharge method (e.g., an ink-jet method, screen printing,or offset printing), or with a tool (apparatus) such as a doctor knife,a roll coater, a curtain coater, a knife coater, or the like. When theinsulating layer 4021 is formed using material liquid, annealing of thesemiconductor layer may be performed in a baking step at the same time.The step of baking the insulating layer 4021 serves to anneal thesemiconductor layer, whereby the display device can be efficientlymanufactured.

The pixel electrode 4030 and the counter electrode 4031 can be formedusing a light-transmitting conductive material such as indium oxideincluding tungsten oxide, indium zinc oxide including tungsten oxide,indium oxide including titanium oxide, indium tin oxide includingtitanium oxide, indium tin oxide (hereinafter referred to as ITO),indium zinc oxide, indium tin oxide to which silicon oxide is added, orthe like.

The pixel electrode 4030 and the counter electrode 4031 can also beformed using a conductive composition including a conductive highmolecule (also referred to as a conductive polymer). The pixel electrodeformed using the conductive composition preferably has a sheetresistance of less than or equal to 10000 ohms per square and atransmittance of greater than or equal to 70% at a wavelength of 550 nm.Further, the resistivity of the conductive high molecule included in theconductive composition is preferably less than or equal to 0.1 Ω·cm.

As the conductive high molecule, a so-called π-electron conjugatedconductive polymer can be used. Examples thereof are polyaniline or aderivative thereof, polypyrrole or a derivative thereof, polythiopheneor a derivative thereof, and a copolymer of two or more kinds of thesematerials.

Further, a variety of signals and potentials are supplied from an FPC4018 to the signal line driver circuit 4003 which is separately formed,the scan line driver circuit 4004, or the pixel portion 4002.

In this embodiment, a connection terminal electrode 4015 is formed usingthe same conductive film as the pixel electrode 4030 included in theliquid crystal element 4013, and a terminal electrode 4016 is formedusing the same conductive film as the source electrodes and the drainelectrodes of the TFTs 4010 and 4011.

The connection terminal electrode 4015 is electrically connected to aterminal included in the FPC 4018 via an anisotropic conductive film4019.

Although FIGS. 23A1 to 23B illustrate an example in which the signalline driver circuit 4003 is formed separately and mounted on the firstsubstrate 4001, this embodiment is not limited to this structure. Thescan line driver circuit may be separately formed and then mounted, oronly part of the signal line driver circuit or part of the scan linedriver circuit may be separately formed and then mounted.

As described above, a system-on-panel display device can bemanufactured. For the display device in this embodiment, the shiftregister in the above embodiments can be used in the driver circuit, forexample, and the shift register can be formed in the same process as theTFT in the display portion.

Note that this embodiment can be combined with or replaced by any of theother embodiments as appropriate.

Embodiment 11

The display devices described in Embodiments 6 to 10 can be applied to avariety of electronic devices (including amusement machines). Examplesof electronic devices are a television device (also referred to as atelevision or a television receiver), a monitor of a computer or thelike, a camera such as a digital camera or a digital video camera, adigital photo frame, a mobile phone (also referred to as a mobiletelephone or a mobile phone device), a portable game machine, a portableinformation terminal, an audio reproducing device, a large-sized gamemachine such as a pachinko machine, and the like.

FIG. 24A illustrates an example of a television device. In a televisiondevice 9600, a display portion 9603 is incorporated in a housing 9601.The display portion 9603 can display images. Here, the housing 9601 issupported by a stand 9605.

The television device 9600 can be operated with an operation switch ofthe housing 9601 or a separate remote controller 9610. Channels andvolume can be controlled with an operation key 9609 of the remotecontroller 9610 so that an image displayed on the display portion 9603can be controlled. Furthermore, the remote controller 9610 may beprovided with a display portion 9607 for displaying data output from theremote controller 9610.

Note that the television device 9600 is provided with a receiver, amodem, and the like. With the use of the receiver, general televisionbroadcasting can be received. Furthermore, when the television device9600 is connected to a communication network by wired or wirelessconnection via the modem, one-way (from a transmitter to a receiver) ortwo-way (between a transmitter and a receiver, between receivers, or thelike) data communication can be performed.

FIG. 24B illustrates an example of a digital photo frame. For example,in a digital photo frame 9700, a display portion 9703 is incorporated ina housing 9701. The display portion 9703 can display a variety ofimages. For example, the display portion 9703 can display data of animage taken with a digital camera or the like and function as a normalphoto frame

Note that the digital photo frame 9700 is provided with an operationportion, an external connection portion (a USB terminal, a terminalconnectable to various cables such as a USB cable, or the like), arecording medium insertion portion, and the like. Although thesecomponents may be provided on the surface on which the display portionis provided, it is preferable to provide them on the side surface or theback surface for the design of the digital photo frame 9700. Forexample, a memory storing data of an image taken with a digital camerais inserted in the recording medium insertion portion of the digitalphoto frame, whereby the image data can be transferred and thendisplayed on the display portion 9703.

The digital photo frame 9700 may be configured to transmit and receivedata wirelessly. The structure may be employed in which desired imagedata is transferred wirelessly to be displayed.

FIG. 25A illustrates a portable game machine including a housing 9881and a housing 9891 which are jointed with a connector 9893 so as to beable to open and close. A display portion 9882 and a display portion9883 are incorporated in the housing 9881 and the housing 9891,respectively. The portable game machine illustrated in FIG. 25Aadditionally includes a speaker portion 9884, a recording mediuminserting portion 9886, an LED lamp 9890, an input means (operation keys9885, a connection terminal 9887, a sensor 9888 (including a function ofmeasuring force, displacement, position, speed, acceleration, angularspeed, the number of rotations, distance, light, liquid, magnetism,temperature, chemical substance, sound, time, hardness, electric field,current, voltage, electric power, radiation, flow rate, humidity, tiltangle, vibration, smell, or infrared ray), a microphone 9889), and thelike. It is needless to say that the structure of the portable gamemachine is not limited to that described above. The portable gamemachine may have a structure in which additional accessory equipment isprovided as appropriate as long as at least a display device isprovided. The portable game machine illustrated in FIG. 25A has afunction of reading a program or data stored in a recording medium todisplay it on the display portion, and a function of sharing informationwith another portable game machine by wireless communication. Theportable game machine illustrated in FIG. 25A can have various functionswithout limitation to the above.

FIG. 25B illustrates an example of a slot machine, which is alarge-sized game machine. In a slot machine 9900, a display portion 9903is incorporated in a housing 9901. In addition, the slot machine 9900includes an operation means such as a start lever or a stop switch, acoin slot, a speaker, and the like. Needless to say, the structure ofthe slot machine 9900 is not limited to the above structure. The slotmachine may have a structure in which additional accessory equipment isprovided as appropriate as long as at least the display device accordingto the present invention is provided.

FIG. 26A illustrates an example of a mobile phone. A mobile phone 9000is provided with a display portion 9002 incorporated into a housing9001, an operation button 9003, an external connection port 9004, aspeaker 9005, a microphone 9006, and the like.

When the display portion 9002 of the mobile phone 9000 illustrated inFIG. 26A is touched with a finger or the like, data can be input intothe mobile phone 9000. Users can make a call or text messaging bytouching the display portion 9002 with their fingers or the like.

There are mainly three screen modes of the display portion 9002. Thefirst mode is a display mode mainly for displaying an image. The secondmode is an input mode mainly for inputting data such as text. The thirdmode is a display-and-input mode in which two modes of the display modeand the input mode are combined.

For example, in the case of making a call or texting, a text input modemainly for inputting text is selected for the display portion 9002 sothat characters displayed on a screen can be input. In that case, it ispreferable to display a keyboard or number buttons on almost all area ofthe screen of the display portion 9002.

When a detection device including a sensor for detecting inclination,such as a gyroscope or an acceleration sensor, is provided inside themobile phone 9000, display on the screen of the display portion 9002 canbe automatically changed by determining the orientation of the mobilephone 9000 (whether the mobile phone 9000 stands upright or is laid downon its side).

The screen modes are changed by touching the display portion 9002 orusing the operation buttons 9003 of the housing 9001. Alternatively, thescreen modes may be changed depending on the kind of the image displayedon the display portion 9002. For example, when a signal of an imagedisplayed on the display portion is a signal of moving image data, thescreen mode is switched to the display mode. When the signal is a signalof text data, the screen mode is switched to the input mode.

Further, in the input mode, when input by touching the display portion9002 is not performed for a certain period while a signal detected by anoptical sensor in the display portion 9002 is detected, the screen modemay be controlled so as to be changed from the input mode to the displaymode.

The display portion 9002 can also function as an image sensor. Forexample, an image of a palm print, a fingerprint, or the like is takenwhen the display portion 9002 is touched with a palm or a finger,whereby personal identification can be performed. Further, by providinga backlight or a sensing light source which emits a near-infrared lightin the display portion, an image of a finger vein, a palm vein, or thelike can be taken.

FIG. 26B illustrates another example of a mobile phone. The mobile phonein FIG. 26B includes a display device 9410 in which a display portion9412 and operation buttons 9413 are included in a housing 9411; and acommunication device 9400 in which operation buttons 9402, an externalinput terminal 9403, a microphone 9404, a speaker 9405, and alight-emitting portion 9406 that emits light when receiving a call areincluded in a housing 9401. The display device 9410 having a displayfunction can be detached from and attached to the communication device9400 having a telephone function in two directions indicated by arrows.Thus, the display device 9410 and the communication device 9400 can beattached to each other along their short sides or long sides. Inaddition, when only the display function is needed, the display device9410 can be detached from the communication device 9400 and used alone.Images or input information can be transmitted or received by wirelessor wire communication between the communication device 9400 and thedisplay device 9410, each of which has a rechargeable battery.

This embodiment can be implemented in appropriate combination with thestructures described in the other embodiments.

Example 1

In this example, a light-emitting display device in which a scan linedriver circuit and a signal line driver circuit are formed over onesubstrate will be described. Note that as an example, in thelight-emitting display device of this example, the signal line drivercircuit has the structure illustrated in FIG. 12A, a shift registerincluded in the signal line driver circuit has the structure illustratedin FIG. 13C, and a pixel has a circuit structure illustrated in FIG. 18.

A layout of a pixel portion in the light-emitting display device of thisexample will be described with reference to FIG. 27. FIG. 27 illustratesa layout of the pixel portion of the light-emitting display device ofthis example.

The pixel portion of the light-emitting display device in FIG. 27includes a plurality of pixels. Each pixel includes a transistor 3001, acapacitor 3002, a transistor 3003, a scan line 3011, a signal line 3012,and a power supply line 3013. The transistor 3001 corresponds to thetransistor 851 in FIG. 18. The capacitor 3002 corresponds to thecapacitor 852 in FIG. 18. The transistor 3003 corresponds to thetransistor 853 in FIG. 18. The scan line 3011 corresponds to the scanline 855 in FIG. 18. The signal line 3012 corresponds to the signal line856 in FIG. 18. The transistors 3001 and 3003 each include anIn—Ga—Zn—O-based oxide semiconductor layer as a channel formation layer.As for the pixels of the light-emitting display device of this example,the number of pixels is 540×960×3, a pixel pitch is 0.026 mm×0.078 mm×3,resolution is 326 ppi, and an aperture ratio is 40%.

The pixel in the light-emitting display device in FIG. 27 has abottom-emission structure and color filters of R (red), G (green), and B(blue) are provided on a substrate (element substrate) side over whichan element such as a transistor is formed (such a structure is referredto as a color filter on array structure). The light-emitting element isa white organic EL element.

Power consumption of the light-emitting display device of this examplewas measured. FIG. 28 shows the measurement result. FIG. 28 shows arelationship between power supply voltage of the light-emitting displaydevice of this example and power consumption of the display device. Thehorizontal axis indicates power supply voltage Vpp and the vertical axisindicates power consumption. FIG. 28 shows power consumption of aconventional light-emitting display device in which a four-phase clocksignal is used in addition to the measurement result of the powerconsumption of the light-emitting display device of this embodiment, inwhich an eight-phase clock signal is used.

As shown in FIG. 28, the light-emitting display device of this exampleconsumes less power than the conventional light-emitting display device.The gap between the power consumptions widened as the power supplyvoltage becomes higher.

Thus, it is found that power consumption can be reduced in such a mannerthat the number of clock signals is increased and the number offlip-flops which operate in accordance with each clock signal isreduced.

This application is based on Japanese Patent Application serial no.2009-235109 filed with Japan Patent Office on. Oct. 9, 2009, andJapanese Patent Application serial no. 2009-273914 filed with JapanPaten Office on Dec. 1, 2009, the entire contents of which are herebyincorporated by reference.

1. A shift register comprising: a first flip-flop to which a first clocksignal which is in a first voltage state in a first period and in asecond voltage state in second to fourth periods is input; a secondflip-flop to which a second clock signal which is in the first voltagestate in at least part of the second period and in the second voltagestate in at least part of the third period, and the fourth period isinput; a third flip-flop to which a third clock signal which is in thesecond voltage state in the first, second, and fourth periods and in thefirst voltage state in the third period is input; and a fourth flip-flopto which a fourth clock signal which is in the second voltage state inat least part of the first period, and the second period and in thefirst voltage state in at least part of the fourth period is input.